JPH0467343U - - Google Patents
Info
- Publication number
- JPH0467343U JPH0467343U JP10994590U JP10994590U JPH0467343U JP H0467343 U JPH0467343 U JP H0467343U JP 10994590 U JP10994590 U JP 10994590U JP 10994590 U JP10994590 U JP 10994590U JP H0467343 U JPH0467343 U JP H0467343U
- Authority
- JP
- Japan
- Prior art keywords
- holding part
- suction
- flexible joint
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Description
第１図は、この考案の一実施例のフレキシブル
結合部を採用した半導体ウエーハ吸着ペンの側面
図である。第２図は、従来の固定式半導体ウエー
ハ吸着ペンの側面図である。
２……保持部、３……フレキシブル結合部、４
……吸着ヘツド、６ａ……固定軸（押出しタイプ
）、６ｂ……固定軸（引張りタイプ）。
FIG. 1 is a side view of a semiconductor wafer suction pen employing a flexible joint according to an embodiment of this invention. FIG. 2 is a side view of a conventional fixed type semiconductor wafer suction pen. 2... Holding part, 3... Flexible coupling part, 4
...Adsorption head, 6a...Fixed shaft (extrusion type), 6b...Fixed shaft (tension type).
Claims (1)
て連結したことを特徴とする吸着ペン。 A suction pen characterized in that a suction head and a holding part are connected by a flexible joint.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10994590U JPH0467343U (en) | 1990-10-19 | 1990-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10994590U JPH0467343U (en) | 1990-10-19 | 1990-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0467343U true JPH0467343U (en) | 1992-06-15 |
Family
ID=31857212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10994590U Pending JPH0467343U (en) | 1990-10-19 | 1990-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0467343U (en) |
-
1990
- 1990-10-19 JP JP10994590U patent/JPH0467343U/ja active Pending