JPH0338637U - - Google Patents
Info
- Publication number
- JPH0338637U JPH0338637U JP9883589U JP9883589U JPH0338637U JP H0338637 U JPH0338637 U JP H0338637U JP 9883589 U JP9883589 U JP 9883589U JP 9883589 U JP9883589 U JP 9883589U JP H0338637 U JPH0338637 U JP H0338637U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- semiconductor wafer
- airflow
- hole
- blowout hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
Description
第１図は本考案に係る搬送治具の断面図、第２
図は同じく要部拡大断面図である。第３図は従来
の搬送治具の断面図、第４図は従来の異なる搬送
治具の断面図、第５図は課題を説明するための断
面図である。
８…治具本体（平板）、１１…吸引ヘツド、１
１ａ…吸引面中央凹部、１２…吹き出し孔、１３
…吸い込み孔、Ｗ…半導体ウエーハ、Ｃ…気流。
Figure 1 is a sectional view of the conveyance jig according to the present invention, Figure 2
The figure is also an enlarged sectional view of the main part. FIG. 3 is a cross-sectional view of a conventional conveying jig, FIG. 4 is a cross-sectional view of a different conventional conveying jig, and FIG. 5 is a cross-sectional view for explaining the problem. 8...Jig body (flat plate), 11...Suction head, 1
1a...Suction surface center recess, 12...Blowout hole, 13
... Suction hole, W... Semiconductor wafer, C... Air flow.
Claims (1)
複数の吸引ヘツドを突設し、 上記各吸引ヘツドの半導体ウエーハと対向する
吸引面中央凹部に、気流の吹き出し孔を開口させ
るとともに、上記吹き出し孔を囲繞して、気流の
吸い込み孔を開口させたことを特徴とする半導体
ウエーハの搬送治具。[Scope of Claim for Utility Model Registration] A plurality of suction heads are provided protrudingly on the opposite side of the jig body facing the semiconductor wafer, and an airflow blowout hole is provided in the central concave portion of the suction surface of each suction head facing the semiconductor wafer. 1. A semiconductor wafer transport jig, characterized in that an airflow suction hole is opened and surrounds the blowout hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9883589U JPH0338637U (en) | 1989-08-23 | 1989-08-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9883589U JPH0338637U (en) | 1989-08-23 | 1989-08-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0338637U true JPH0338637U (en) | 1991-04-15 |
Family
ID=31647914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9883589U Pending JPH0338637U (en) | 1989-08-23 | 1989-08-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0338637U (en) |
-
1989
- 1989-08-23 JP JP9883589U patent/JPH0338637U/ja active Pending