JPH0249127U - - Google Patents
Info
- Publication number
- JPH0249127U JPH0249127U JP12863388U JP12863388U JPH0249127U JP H0249127 U JPH0249127 U JP H0249127U JP 12863388 U JP12863388 U JP 12863388U JP 12863388 U JP12863388 U JP 12863388U JP H0249127 U JPH0249127 U JP H0249127U
- Authority
- JP
- Japan
- Prior art keywords
- hot plate
- wafer
- conveyor belt
- oven
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は本考案のホツトプレートオーブンの第
１実施例の斜視図、第２図は第１図中ＡＡ′線断
面図、第３図は第２実施例の斜視図、第４図は第
３図中ＡＡ′線断面図、第５図は従来のホツトプ
レートオーブンの斜視図、第６図と第７図は第３
図中ＡＡ′線断面図である。
１……ウエーハ、２……搬送ベルト、３……ホ
ツトプレート、４……バキユーム穴、６……Ｎ２
切替バルブ。
Fig. 1 is a perspective view of the first embodiment of the hot plate oven of the present invention, Fig. 2 is a sectional view taken along the line AA' in Fig. 1, Fig. 3 is a perspective view of the second embodiment, and Fig. 4 is the 3 is a cross-sectional view taken along line AA', FIG. 5 is a perspective view of a conventional hot plate oven, and FIGS.
It is a sectional view taken along line AA' in the figure. 1...Wafer, 2...Transport belt, 3...Hot plate, 4...Vacuum hole, 6...N 2
switching valve.
Claims (1)
送ベルトで搬送し、ホツトプレートに形成された
バキユーム穴でウエーハを吸引し、設定された処
理を行なうホツトプレートオーブンにおいて、処
理後ウエーハをホツトプレート表面から離なす際
の搬送ベルトの上昇によりウエーハに印加される
衝撃力をウエーハ面で一様に減少させる手段を備
えたことを特徴とするホツトプレートオーブン。 The wafer is transported to a predetermined position on the hot plate by a conveyor belt, the wafer is sucked through a vacuum hole formed in the hot plate, and the wafer is separated from the hot plate surface after processing in the hot plate oven where the set processing is performed. 1. A hot plate oven comprising means for uniformly reducing the impact force applied to a wafer on the wafer surface due to the lifting of a conveyor belt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12863388U JPH0249127U (en) | 1988-09-29 | 1988-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12863388U JPH0249127U (en) | 1988-09-29 | 1988-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0249127U true JPH0249127U (en) | 1990-04-05 |
Family
ID=31382157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12863388U Pending JPH0249127U (en) | 1988-09-29 | 1988-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249127U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61222815A (en) * | 1985-03-29 | 1986-10-03 | Aichi Mach Ind Co Ltd | Window weather strip |
-
1988
- 1988-09-29 JP JP12863388U patent/JPH0249127U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61222815A (en) * | 1985-03-29 | 1986-10-03 | Aichi Mach Ind Co Ltd | Window weather strip |