JPH0186240U - - Google Patents
Info
- Publication number
- JPH0186240U JPH0186240U JP18308787U JP18308787U JPH0186240U JP H0186240 U JPH0186240 U JP H0186240U JP 18308787 U JP18308787 U JP 18308787U JP 18308787 U JP18308787 U JP 18308787U JP H0186240 U JPH0186240 U JP H0186240U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- roller
- function
- semiconductor devices
- suction section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 1
Landscapes
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Description
第１図はこの考案の一実施例を示す部分斜視図
、第２図は従来装置を示す部分断面側面図、第３
図はその部分斜視図である。図中、３′はローラ
ガイド、４′はローラである。なお、各図中同一
符号は同一又は相当部分を示す。
Fig. 1 is a partial perspective view showing an embodiment of this invention, Fig. 2 is a partially sectional side view showing a conventional device, and Fig. 3 is a partial perspective view showing an embodiment of the invention.
The figure is a partial perspective view. In the figure, 3' is a roller guide, and 4' is a roller. Note that the same reference numerals in each figure indicate the same or equivalent parts.
Claims (1)
定された上記半導体素子の吸着離脱及びブレイク
機能を持つた吸着部、上記プレートと一体化され
たローラをはさみ込んだローラガイド、上記吸着
部のブレイク機能に対して、上記ローラを設けた
ことを特徴とする半導体製造装置。 A plate for transporting semiconductor devices, a suction section that has a function of attracting and separating the semiconductor devices fixed to the plate, and a break function, a roller guide that holds a roller integrated with the plate, and a break function of the suction section. A semiconductor manufacturing apparatus characterized in that the roller described above is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18308787U JPH0186240U (en) | 1987-11-30 | 1987-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18308787U JPH0186240U (en) | 1987-11-30 | 1987-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0186240U true JPH0186240U (en) | 1989-06-07 |
Family
ID=31474520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18308787U Pending JPH0186240U (en) | 1987-11-30 | 1987-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0186240U (en) |
-
1987
- 1987-11-30 JP JP18308787U patent/JPH0186240U/ja active Pending