JPS63137939U - - Google Patents
Info
- Publication number
- JPS63137939U JPS63137939U JP3096787U JP3096787U JPS63137939U JP S63137939 U JPS63137939 U JP S63137939U JP 3096787 U JP3096787 U JP 3096787U JP 3096787 U JP3096787 U JP 3096787U JP S63137939 U JPS63137939 U JP S63137939U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- wafer transfer
- boat
- transfer table
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Description
第１図は、この考案の一実施例を示す斜視図、
第２図、第３図は、ウエハ移し替機の作動状態を
示す側面図、第４図は、使用状態を示す斜視図、
第５図は、従来例を示す平面図である。
１０……ウエハ移し替用テーブル、１１……ボ
ートステージ、１２……キヤリアステージ。
FIG. 1 is a perspective view showing an embodiment of this invention;
2 and 3 are side views showing the operating state of the wafer transfer machine, and FIG. 4 is a perspective view showing the operating state of the wafer transfer machine.
FIG. 5 is a plan view showing a conventional example. 10...Wafer transfer table, 11...Boat stage, 12...Carrier stage.
Claims (1)
アステージとを設けたウエハ移し替装置において
、ボートステージとキヤリアステージが、移し替
用テーブルの長手方向に沿つて直列に配設されて
いることを特徴とするウエハ移し替装置。 A wafer transfer device in which a transfer table is provided with a boat stage and a carrier stage, characterized in that the boat stage and the carrier stage are arranged in series along the longitudinal direction of the transfer table. Wafer transfer equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987030967U JPH0610686Y2 (en) | 1987-03-03 | 1987-03-03 | Wafer transfer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987030967U JPH0610686Y2 (en) | 1987-03-03 | 1987-03-03 | Wafer transfer device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63137939U true JPS63137939U (en) | 1988-09-12 |
| JPH0610686Y2 JPH0610686Y2 (en) | 1994-03-16 |
Family
ID=30836262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987030967U Expired - Lifetime JPH0610686Y2 (en) | 1987-03-03 | 1987-03-03 | Wafer transfer device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0610686Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015159836A1 (en) * | 2014-04-14 | 2015-10-22 | 富士フイルム株式会社 | Stress measurement method, member for stress measurement, and set for stress measurement |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5991735U (en) * | 1982-12-10 | 1984-06-21 | 日本電気ホームエレクトロニクス株式会社 | Semiconductor wafer transfer equipment |
-
1987
- 1987-03-03 JP JP1987030967U patent/JPH0610686Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5991735U (en) * | 1982-12-10 | 1984-06-21 | 日本電気ホームエレクトロニクス株式会社 | Semiconductor wafer transfer equipment |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015159836A1 (en) * | 2014-04-14 | 2015-10-22 | 富士フイルム株式会社 | Stress measurement method, member for stress measurement, and set for stress measurement |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0610686Y2 (en) | 1994-03-16 |