JPS63177047U - - Google Patents
Info
- Publication number
- JPS63177047U JPS63177047U JP6672087U JP6672087U JPS63177047U JP S63177047 U JPS63177047 U JP S63177047U JP 6672087 U JP6672087 U JP 6672087U JP 6672087 U JP6672087 U JP 6672087U JP S63177047 U JPS63177047 U JP S63177047U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- wafer
- carrier
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
Description
第１図は本考案の一実施例を示す透視図、第２
図は第１図の縦断面図である。
１１……半導体ウエハー収納キヤリア、１２…
…キヤリアの溝、１３……半導体ウエハーの取出
し治具、１４……ウエハーの押上げ部、１５……
ウエハー選別部、２１……半導体ウエハー収納キ
ヤリア、２２……半導体ウエハー、２３……半導
体ウエハーの取出し治具、２４……ウエハーの押
上げ部、２５……ウエハーの選別部。
Fig. 1 is a perspective view showing one embodiment of the present invention;
The figure is a longitudinal sectional view of FIG. 1. 11... Semiconductor wafer storage carrier, 12...
...Carrier groove, 13... Semiconductor wafer take-out jig, 14... Wafer push-up part, 15...
Wafer sorting section, 21... Semiconductor wafer storage carrier, 22... Semiconductor wafer, 23... Semiconductor wafer take-out jig, 24... Wafer push-up section, 25... Wafer sorting section.
Claims (1)
取出す手段を有する半導体ウエハーのケース。 A semiconductor wafer case having means for individually taking out each wafer stored in a carrier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6672087U JPS63177047U (en) | 1987-04-30 | 1987-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6672087U JPS63177047U (en) | 1987-04-30 | 1987-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63177047U true JPS63177047U (en) | 1988-11-16 |
Family
ID=30904989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6672087U Pending JPS63177047U (en) | 1987-04-30 | 1987-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63177047U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007273643A (en) * | 2006-03-30 | 2007-10-18 | Phyzchemix Corp | Wafer cassette and wafer storing method |
-
1987
- 1987-04-30 JP JP6672087U patent/JPS63177047U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007273643A (en) * | 2006-03-30 | 2007-10-18 | Phyzchemix Corp | Wafer cassette and wafer storing method |