JPH01143133U - - Google Patents
Info
- Publication number
- JPH01143133U JPH01143133U JP3878688U JP3878688U JPH01143133U JP H01143133 U JPH01143133 U JP H01143133U JP 3878688 U JP3878688 U JP 3878688U JP 3878688 U JP3878688 U JP 3878688U JP H01143133 U JPH01143133 U JP H01143133U
- Authority
- JP
- Japan
- Prior art keywords
- holes
- container
- rods
- utility
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
Description
第１図は本考案の実施例を示す斜視図、第２図
乃至第３図はロツドの一例を示す斜視図である。
１…容器（キヤリア）、２…半導体ウエハ、３
ａ，３ｂ，３ｃ，３ｄ，３ｅ，３ｆ…穴、４…ロ
ツド。
FIG. 1 is a perspective view showing an embodiment of the present invention, and FIGS. 2 and 3 are perspective views showing an example of the rod. 1... Container (carrier), 2... Semiconductor wafer, 3
a, 3b, 3c, 3d, 3e, 3f...hole, 4...rod.
Claims (1)
を穿設し、少なくとも端部を着色したロツドを前
記穴に選択的に挿入したことを特徴とする半導体
ウエハキヤリア。 1. A semiconductor wafer carrier, characterized in that a plurality of holes are formed in the outer surface of a container for storing semiconductor wafers, and rods having at least colored ends are selectively inserted into the holes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3878688U JPH01143133U (en) | 1988-03-23 | 1988-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3878688U JPH01143133U (en) | 1988-03-23 | 1988-03-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01143133U true JPH01143133U (en) | 1989-10-02 |
Family
ID=31265324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3878688U Pending JPH01143133U (en) | 1988-03-23 | 1988-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01143133U (en) |
-
1988
- 1988-03-23 JP JP3878688U patent/JPH01143133U/ja active Pending
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