JPS6278683U - - Google Patents
Info
- Publication number
- JPS6278683U JPS6278683U JP17160585U JP17160585U JPS6278683U JP S6278683 U JPS6278683 U JP S6278683U JP 17160585 U JP17160585 U JP 17160585U JP 17160585 U JP17160585 U JP 17160585U JP S6278683 U JPS6278683 U JP S6278683U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- container
- planar shape
- inner container
- notch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 description 6
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図はこの考案の実施例であるウエハ容器の
分解斜視図、第２図は上記ウエハ容器内にウエハ
を収納したときの断面図、第３図は内容器の平面
図、第４図はウエハの平面図をそれぞれ示してい
る。
１……オリエンテーシヨンフラツト部、２，２
ａ，２ｂ……外容器、３……内容器、４……ウエ
ハ、５……ウエハ収納空間部、６……切込部、７
……分離紙。
Fig. 1 is an exploded perspective view of a wafer container that is an embodiment of this invention, Fig. 2 is a sectional view when wafers are stored in the wafer container, Fig. 3 is a plan view of the inner container, and Fig. 4 is a A plan view of each wafer is shown. 1... Orientation flat part, 2, 2
a, 2b...outer container, 3...inner container, 4...wafer, 5...wafer storage space, 6...notch, 7
... Separation paper.
Claims (1)
状と略同一であるとともに、ウエハのオリエンテ
ーシヨンフラツト部に対向する側面部分に切込部
が形成してある有底円筒状の内容器と、この内容
器を内部に収納する外容器とからなることを特徴
とするウエハの容器。 a bottomed cylindrical inner container in which the planar shape of the wafer storage space is substantially the same as the planar shape of the wafer, and a notch is formed in the side surface facing the orientation flat portion of the wafer; A wafer container comprising an outer container that houses the inner container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17160585U JPS6278683U (en) | 1985-11-06 | 1985-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17160585U JPS6278683U (en) | 1985-11-06 | 1985-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6278683U true JPS6278683U (en) | 1987-05-20 |
Family
ID=31107384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17160585U Pending JPS6278683U (en) | 1985-11-06 | 1985-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6278683U (en) |
-
1985
- 1985-11-06 JP JP17160585U patent/JPS6278683U/ja active Pending