JPS62140731U - - Google Patents
Info
- Publication number
- JPS62140731U JPS62140731U JP2666086U JP2666086U JPS62140731U JP S62140731 U JPS62140731 U JP S62140731U JP 2666086 U JP2666086 U JP 2666086U JP 2666086 U JP2666086 U JP 2666086U JP S62140731 U JPS62140731 U JP S62140731U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- members
- view
- semiconductor
- orientation flat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 claims 5
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
- Packaging Frangible Articles (AREA)
Description
第１図は本考案の一実施例を示し、第１図ａは
平面図、同ｂはａのＢ―Ｂ線断面図、ｃは断面の
一部拡大図である。第２図は全体構成を示す収納
状態斜視図、第３図は同じく収納状態を示す側断
面図である。第４図ａ，ｂはばね部構成の変形例
を示す。第５図ａは箱本体の平面図、同ｂはａの
ｂ―ｂ線断面図である。第６図は従来例を示す。
１…部材、１６…オリエンテーシヨンフラツト
に対する係合部、２…半導体ウエハ。
FIG. 1 shows an embodiment of the present invention, in which FIG. 1a is a plan view, FIG. 1b is a cross-sectional view taken along line B--B of a, and FIG. FIG. 2 is a perspective view of the entire configuration in a stored state, and FIG. 3 is a side sectional view similarly showing the stored state. FIGS. 4a and 4b show modified examples of the structure of the spring portion. FIG. 5a is a plan view of the box body, and FIG. 5b is a cross-sectional view taken along line bb of a. FIG. 6 shows a conventional example. DESCRIPTION OF SYMBOLS 1... Member, 16... Engagement part for orientation flat, 2... Semiconductor wafer.
Claims (1)
ね、該部材間に半導体ウエハを収納する半導体ウ
エハ容器において、 上記の部材に半導体ウエハのオリエンテーシヨ
ンフラツトに対する係合部を設けたことを特徴と
する半導体ウエハ容器。[Claims for Utility Model Registration] In a semiconductor wafer container in which two or more members for placing semiconductor wafers are stacked and the semiconductor wafer is stored between the members, the engagement of said member with the orientation flat of the semiconductor wafer is provided. A semiconductor wafer container characterized by having a section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2666086U JPH0534110Y2 (en) | 1986-02-27 | 1986-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2666086U JPH0534110Y2 (en) | 1986-02-27 | 1986-02-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62140731U true JPS62140731U (en) | 1987-09-05 |
| JPH0534110Y2 JPH0534110Y2 (en) | 1993-08-30 |
Family
ID=30827949
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2666086U Expired - Lifetime JPH0534110Y2 (en) | 1986-02-27 | 1986-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0534110Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004009472A1 (en) * | 2002-07-22 | 2004-01-29 | Asahi Glass Company, Limited | Method and tray for transporting large glass pane |
-
1986
- 1986-02-27 JP JP2666086U patent/JPH0534110Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0534110Y2 (en) | 1993-08-30 |