JPS6162882U - - Google Patents

Info

Publication number
JPS6162882U
JPS6162882U JP14831784U JP14831784U JPS6162882U JP S6162882 U JPS6162882 U JP S6162882U JP 14831784 U JP14831784 U JP 14831784U JP 14831784 U JP14831784 U JP 14831784U JP S6162882 U JPS6162882 U JP S6162882U
Authority
JP
Japan
Prior art keywords
lid
main body
container
inner edge
curvature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14831784U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14831784U priority Critical patent/JPS6162882U/ja
Publication of JPS6162882U publication Critical patent/JPS6162882U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Closures For Containers (AREA)
  • Packaging Frangible Articles (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案に係る半導体ウエーハ収納容器
の蓋の断面図である。第２図は本体に蓋を被せた
状態の断面図である。 図中１…蓋、２…本体、３…ウエーハ保持具、
４…蓋底辺内縁部。 FIG. 1 is a sectional view of the lid of the semiconductor wafer storage container according to the present invention. FIG. 2 is a cross-sectional view of the main body with the lid on. In the figure 1...lid, 2...main body, 3...wafer holder,
4...Inner edge of the bottom of the lid.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ウエーハ容器の本体と蓋とを強固に嵌合させて
気密性を保つ構造のウエーハ容器において、蓋の
底辺の内縁が０．１mm以上の曲率半径を有するこ
とを特徴とする半導体ウエーハ収納容器。 A semiconductor wafer storage container having a structure in which the main body and the lid of the wafer container are tightly fitted to maintain airtightness, wherein the inner edge of the bottom of the lid has a radius of curvature of 0.1 mm or more.
JP14831784U 1984-09-28 1984-09-28 Pending JPS6162882U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14831784U JPS6162882U (en) 1984-09-28 1984-09-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14831784U JPS6162882U (en) 1984-09-28 1984-09-28

Publications (1)

Publication Number Publication Date
JPS6162882U true JPS6162882U (en) 1986-04-28

Family

ID=30706533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14831784U Pending JPS6162882U (en) 1984-09-28 1984-09-28

Country Status (1)

Country Link
JP (1) JPS6162882U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01243041A (en) * 1988-03-24 1989-09-27 Matsushita Electric Ind Co Ltd Photographic device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60194516A (en) * 1984-03-16 1985-10-03 Hitachi Ltd Case for wafer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60194516A (en) * 1984-03-16 1985-10-03 Hitachi Ltd Case for wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01243041A (en) * 1988-03-24 1989-09-27 Matsushita Electric Ind Co Ltd Photographic device

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