JPS6287442U - - Google Patents
Info
- Publication number
- JPS6287442U JPS6287442U JP17837785U JP17837785U JPS6287442U JP S6287442 U JPS6287442 U JP S6287442U JP 17837785 U JP17837785 U JP 17837785U JP 17837785 U JP17837785 U JP 17837785U JP S6287442 U JPS6287442 U JP S6287442U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- wafer container
- irregularities
- seal
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000012856 packing Methods 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Description
第1図、第2図及び第3図はそれぞれ本考案の
実施例にかかる縦断面図、第4図は、従来例の半
導体ウエハ容器の縦断面図である。
1……容器本体、2……容器蓋、3……容器内
部、4……凹凸状の接続面、5……パツキン、6
……平面な接続面、7……半導体ウエハ。
FIGS. 1, 2, and 3 are longitudinal cross-sectional views of embodiments of the present invention, and FIG. 4 is a vertical cross-sectional view of a conventional semiconductor wafer container. DESCRIPTION OF SYMBOLS 1... Container body, 2... Container lid, 3... Container interior, 4... Uneven connection surface, 5... Packing, 6
...Flat connection surface, 7...Semiconductor wafer.
Claims (1)
の接続面に凹凸又は、パツキンを有することを特
徴とする半導体ウエハ容器。 A semiconductor wafer container characterized by having irregularities or a seal on a connecting surface between a semiconductor wafer container main body and a semiconductor wafer container lid.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17837785U JPS6287442U (en) | 1985-11-19 | 1985-11-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17837785U JPS6287442U (en) | 1985-11-19 | 1985-11-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6287442U true JPS6287442U (en) | 1987-06-04 |
Family
ID=31120449
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17837785U Pending JPS6287442U (en) | 1985-11-19 | 1985-11-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6287442U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1994025980A1 (en) * | 1993-04-27 | 1994-11-10 | Kyushu Komatsu Electronics Co., Ltd. | Container for packing semiconductor wafer |
WO1998056676A1 (en) * | 1997-06-13 | 1998-12-17 | Kakizaki Manufacturing Co., Ltd. | Cover-carrying thin sheet storage container |
-
1985
- 1985-11-19 JP JP17837785U patent/JPS6287442U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1994025980A1 (en) * | 1993-04-27 | 1994-11-10 | Kyushu Komatsu Electronics Co., Ltd. | Container for packing semiconductor wafer |
WO1998056676A1 (en) * | 1997-06-13 | 1998-12-17 | Kakizaki Manufacturing Co., Ltd. | Cover-carrying thin sheet storage container |