JPS6162881U - - Google Patents
Info
- Publication number
- JPS6162881U JPS6162881U JP14831684U JP14831684U JPS6162881U JP S6162881 U JPS6162881 U JP S6162881U JP 14831684 U JP14831684 U JP 14831684U JP 14831684 U JP14831684 U JP 14831684U JP S6162881 U JPS6162881 U JP S6162881U
- Authority
- JP
- Japan
- Prior art keywords
- lid
- main body
- semiconductor wafer
- storage container
- wafer storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000002390 adhesive tape Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
Description
第１図は本体容器に蓋を取付けた状態の部分拡
大断面図を示す。第２図は蓋の断面図ａ及び平面
図ｂを示す。
図中１…蓋、２…結合用突起、３…容器本体、
４…結合用凹部、５…本体外周部、６…蓋内周部
、７…粘着テープ。
FIG. 1 shows a partially enlarged sectional view of the main container with the lid attached. FIG. 2 shows a sectional view a and a plan view b of the lid. In the figure 1...lid, 2...coupling protrusion, 3...container body,
4...Connection recess, 5...Outer periphery of main body, 6...Inner periphery of lid, 7...Adhesive tape.
Claims (1)
せ気密を保つ構造のウエーハ収納容器において、
蓋内面に設けた突起を本体上縁部に設けた凹部に
結合させ、蓋の浮上を防止する機構を設けたこと
を特徴とする半導体ウエーハ収納容器。 In a wafer storage container having a structure in which the semiconductor wafer container main body and the lid are tightly fitted to maintain airtightness,
A semiconductor wafer storage container characterized by having a mechanism for preventing the lid from floating by connecting a protrusion provided on the inner surface of the lid to a recess provided on the upper edge of the main body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14831684U JPS6162881U (en) | 1984-09-28 | 1984-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14831684U JPS6162881U (en) | 1984-09-28 | 1984-09-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6162881U true JPS6162881U (en) | 1986-04-28 |
Family
ID=30706532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14831684U Pending JPS6162881U (en) | 1984-09-28 | 1984-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6162881U (en) |
-
1984
- 1984-09-28 JP JP14831684U patent/JPS6162881U/ja active Pending