JPH01125551U - - Google Patents
Info
- Publication number
- JPH01125551U JPH01125551U JP2093088U JP2093088U JPH01125551U JP H01125551 U JPH01125551 U JP H01125551U JP 2093088 U JP2093088 U JP 2093088U JP 2093088 U JP2093088 U JP 2093088U JP H01125551 U JPH01125551 U JP H01125551U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cube
- laterally
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 2
Description
第１図は本考案のウエハーケースの一例を示す
断面図（第２図のＡ―Ａ′線断面図）、第２図は
、第１図の上面図、第３図は、従来のウエハーケ
ース断面図である。
１……取り出したいウエハー、２……隣接のウ
エハー、３……垂直収納区切り、４……ピンセツ
ト、５……垂直収納区切り毎の底面、６……垂直
収納区切り毎の側面、７……垂直収納区切り毎の
底面と側面の交点。
Fig. 1 is a cross-sectional view showing an example of the wafer case of the present invention (cross-sectional view taken along line A-A' in Fig. 2), Fig. 2 is a top view of Fig. 1, and Fig. 3 is a conventional wafer case. FIG. 1... Wafer to be taken out, 2... Adjacent wafer, 3... Vertical storage section, 4... Tweezers, 5... Bottom of each vertical storage section, 6... Side of each vertical storage section, 7... Vertical The intersection of the bottom and side of each storage compartment.
Claims (1)
エハーが１枚ずつ側面方向に動く装置を設けたこ
とを特徴とするウエハーケース。 A wafer case characterized in that the storage case is a cube or a rectangular parallelepiped and is equipped with a device that moves wafers one by one laterally.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2093088U JPH01125551U (en) | 1988-02-19 | 1988-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2093088U JPH01125551U (en) | 1988-02-19 | 1988-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01125551U true JPH01125551U (en) | 1989-08-28 |
Family
ID=31237714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2093088U Pending JPH01125551U (en) | 1988-02-19 | 1988-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01125551U (en) |
-
1988
- 1988-02-19 JP JP2093088U patent/JPH01125551U/ja active Pending