JPS61119345U - - Google Patents
Info
- Publication number
- JPS61119345U JPS61119345U JP158885U JP158885U JPS61119345U JP S61119345 U JPS61119345 U JP S61119345U JP 158885 U JP158885 U JP 158885U JP 158885 U JP158885 U JP 158885U JP S61119345 U JPS61119345 U JP S61119345U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- storage case
- bone
- supported
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 10
- 235000012431 wafers Nutrition 0.000 claims 5
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図は従来の半導体ウエハ収納ケースの斜視
図、第２図は同じく半導体ウエハ収納ケースの横
断面図、第３図は本考案の一実施例の半導体ウエ
ハ収納ケースの斜視図、第４図は同じく半導体ウ
エハ収納ケースの横断面図である。
１：ケース本体、２：蓋、３：溝、４：半導体
ウエハ、５：骨状体、６，７：弾性支持体。
FIG. 1 is a perspective view of a conventional semiconductor wafer storage case, FIG. 2 is a cross-sectional view of the same semiconductor wafer storage case, FIG. 3 is a perspective view of a semiconductor wafer storage case according to an embodiment of the present invention, and FIG. 4 1 is a cross-sectional view of the semiconductor wafer storage case. 1: Case body, 2: Lid, 3: Groove, 4: Semiconductor wafer, 5: Skeletal body, 6, 7: Elastic support.
Claims (1)
た複数個の溝と、上方向並びに下方向から支持す
るように設けた複数個の弾性支持体とにより複数
個の半導体ウエハを各個を支持するように構成さ
れている半導体ウエハ収納ケースにおいて、前記
上方向から支持するように設けた弾性支持体が、
前記半導体ウエハが支持されている状態を目視で
きるように骨状体に装着されていて、該骨状体を
介して前記半導体ウエハを上方向から支持するよ
うに構成されていることを特徴とする半導体ウエ
ハ収納ケース。 A plurality of semiconductor wafers are each supported by a plurality of grooves provided on opposing side walls in a case body having a lid, and a plurality of elastic supports provided to support from above and from below. In the semiconductor wafer storage case configured as shown in FIG.
The device is attached to a bone-like body so that the state in which the semiconductor wafer is supported can be visually observed, and is configured to support the semiconductor wafer from above via the bone-like body. Semiconductor wafer storage case.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP158885U JPS61119345U (en) | 1985-01-10 | 1985-01-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP158885U JPS61119345U (en) | 1985-01-10 | 1985-01-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61119345U true JPS61119345U (en) | 1986-07-28 |
Family
ID=30474471
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP158885U Pending JPS61119345U (en) | 1985-01-10 | 1985-01-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61119345U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0388344U (en) * | 1989-12-22 | 1991-09-10 | ||
| JPH06501668A (en) * | 1991-03-08 | 1994-02-24 | フルオロウェア・インコーポレーテッド | Wafer container for shipper |
-
1985
- 1985-01-10 JP JP158885U patent/JPS61119345U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0388344U (en) * | 1989-12-22 | 1991-09-10 | ||
| JPH06501668A (en) * | 1991-03-08 | 1994-02-24 | フルオロウェア・インコーポレーテッド | Wafer container for shipper |