JPS6416639U - - Google Patents
Info
- Publication number
- JPS6416639U JPS6416639U JP11134587U JP11134587U JPS6416639U JP S6416639 U JPS6416639 U JP S6416639U JP 11134587 U JP11134587 U JP 11134587U JP 11134587 U JP11134587 U JP 11134587U JP S6416639 U JPS6416639 U JP S6416639U
- Authority
- JP
- Japan
- Prior art keywords
- storage groove
- utility
- wafer cassette
- scope
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 2
Landscapes
- Weting (AREA)
Description
第１図は本考案によるウエハカセツトの一実施
例のウエハカセツト外観図、第２図はその要部拡
大図である。
１……フレーム、２……ウエハ、３……収納溝
、４……突起部。
FIG. 1 is an external view of a wafer cassette according to an embodiment of the present invention, and FIG. 2 is an enlarged view of its essential parts. 1...Frame, 2...Wafer, 3...Storage groove, 4...Protrusion.
Claims (1)
突起部を設けたことを特徴とするウエハカセツト
。 A wafer cassette characterized in that a storage groove for storing wafers is provided with a hemispherical protrusion having a small radius.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11134587U JPS6416639U (en) | 1987-07-22 | 1987-07-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11134587U JPS6416639U (en) | 1987-07-22 | 1987-07-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6416639U true JPS6416639U (en) | 1989-01-27 |
Family
ID=31349306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11134587U Pending JPS6416639U (en) | 1987-07-22 | 1987-07-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6416639U (en) |
-
1987
- 1987-07-22 JP JP11134587U patent/JPS6416639U/ja active Pending