JPS61150781U - - Google Patents
Info
- Publication number
- JPS61150781U JPS61150781U JP3509385U JP3509385U JPS61150781U JP S61150781 U JPS61150781 U JP S61150781U JP 3509385 U JP3509385 U JP 3509385U JP 3509385 U JP3509385 U JP 3509385U JP S61150781 U JPS61150781 U JP S61150781U
- Authority
- JP
- Japan
- Prior art keywords
- storage jig
- side wall
- outside
- utility
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013013 elastic material Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000004522 Pentaglottis sempervirens Nutrition 0.000 description 2
- 239000012050 conventional carrier Substances 0.000 description 1
Landscapes
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Buffer Packaging (AREA)
- Packaging Frangible Articles (AREA)
Description
第１図は本考案の一実施例の鳥瞰図、第２図は
従来のキヤリアの鳥瞰図である。
１，１１……側壁外側、２，１２……側壁内側
、３，１３……溝。
FIG. 1 is a bird's eye view of one embodiment of the present invention, and FIG. 2 is a bird's eye view of a conventional carrier. 1, 11...Outside side wall, 2, 12...Inside side wall, 3, 13...Groove.
Claims (1)
壁外側に金属、内側の溝部に弾力性材料が設けら
れていることを特徴とする半導体ウエハ用収納治
具。 1. A semiconductor wafer storage jig, characterized in that a metal is provided on the outside of the side wall of the storage jig, and an elastic material is provided on the inside groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3509385U JPS61150781U (en) | 1985-03-12 | 1985-03-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3509385U JPS61150781U (en) | 1985-03-12 | 1985-03-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61150781U true JPS61150781U (en) | 1986-09-18 |
Family
ID=30539060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3509385U Pending JPS61150781U (en) | 1985-03-12 | 1985-03-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61150781U (en) |
-
1985
- 1985-03-12 JP JP3509385U patent/JPS61150781U/ja active Pending