JPS61151343U - - Google Patents
Info
- Publication number
- JPS61151343U JPS61151343U JP3441085U JP3441085U JPS61151343U JP S61151343 U JPS61151343 U JP S61151343U JP 3441085 U JP3441085 U JP 3441085U JP 3441085 U JP3441085 U JP 3441085U JP S61151343 U JPS61151343 U JP S61151343U
- Authority
- JP
- Japan
- Prior art keywords
- storage jig
- semiconductor wafer
- wheels
- side wall
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図は、本考案の実施例の半導体ウエハ用収
納治具の斜視図であり、第２図は正面図である。
第３図は、従来の半導体ウエハ用収納治具の斜視
図である。
尚、図において、１，２……半導体ウエハ用収
納治具の側壁底面部、３，４，５，６……車輪、
７……保管棚のアクリル表面である。
FIG. 1 is a perspective view of a semiconductor wafer storage jig according to an embodiment of the present invention, and FIG. 2 is a front view.
FIG. 3 is a perspective view of a conventional semiconductor wafer storage jig. In the figure, 1, 2... side wall bottom part of the semiconductor wafer storage jig, 3, 4, 5, 6... wheels,
7...This is the acrylic surface of the storage shelf.
Claims (1)
車輪を装備したことを特徴とする半導体ウエハ用
収納治具。 A storage jig for semiconductor wafers, characterized in that wheels are provided at the bottom of the side wall of the metal semiconductor wafer storage jig.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3441085U JPS61151343U (en) | 1985-03-11 | 1985-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3441085U JPS61151343U (en) | 1985-03-11 | 1985-03-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61151343U true JPS61151343U (en) | 1986-09-18 |
Family
ID=30537750
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3441085U Pending JPS61151343U (en) | 1985-03-11 | 1985-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61151343U (en) |
-
1985
- 1985-03-11 JP JP3441085U patent/JPS61151343U/ja active Pending