JPS61151344U - - Google Patents
Info
- Publication number
- JPS61151344U JPS61151344U JP3441185U JP3441185U JPS61151344U JP S61151344 U JPS61151344 U JP S61151344U JP 3441185 U JP3441185 U JP 3441185U JP 3441185 U JP3441185 U JP 3441185U JP S61151344 U JPS61151344 U JP S61151344U
- Authority
- JP
- Japan
- Prior art keywords
- storage jig
- semiconductor wafer
- side wall
- utility
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図は、本考案の半導体ウエハ用収納治具の
斜視図であり、第２図は、正面図である。第３図
は、従来の半導体ウエハ用収納治具の斜視図であ
る。
尚、図において、１，２，３，４，５，６……
ボールベアリング、７，８……半導体ウエハ用収
納治具の側壁底面部、９……保管棚のアクリル表
面である。
FIG. 1 is a perspective view of the semiconductor wafer storage jig of the present invention, and FIG. 2 is a front view. FIG. 3 is a perspective view of a conventional semiconductor wafer storage jig. In the figure, 1, 2, 3, 4, 5, 6...
Ball bearings, 7, 8...side wall bottom of semiconductor wafer storage jig, 9...acrylic surface of storage shelf.
Claims (1)
ボールベアリングを装着した構造を有することを
特徴とする半導体ウエハ用収納治具。 A storage jig for semiconductor wafers, characterized in that it has a structure in which a ball bearing is attached to the bottom of a side wall of the metal semiconductor wafer storage jig.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3441185U JPS61151344U (en) | 1985-03-11 | 1985-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3441185U JPS61151344U (en) | 1985-03-11 | 1985-03-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61151344U true JPS61151344U (en) | 1986-09-18 |
Family
ID=30537752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3441185U Pending JPS61151344U (en) | 1985-03-11 | 1985-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61151344U (en) |
-
1985
- 1985-03-11 JP JP3441185U patent/JPS61151344U/ja active Pending
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