JPS61140537U - - Google Patents
Info
- Publication number
- JPS61140537U JPS61140537U JP2399885U JP2399885U JPS61140537U JP S61140537 U JPS61140537 U JP S61140537U JP 2399885 U JP2399885 U JP 2399885U JP 2399885 U JP2399885 U JP 2399885U JP S61140537 U JPS61140537 U JP S61140537U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- wafer storage
- storage jig
- side wall
- fluorine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 2
- 229910052731 fluorine Inorganic materials 0.000 claims description 2
- 239000011737 fluorine Substances 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
Description
第１図は、従来の半導体ウエハ収納治具の斜視
図である。第２図は、本考案の実施例の斜視図で
あり、第３図は、正面図である。
尚、図において、１，２……収納治具の側壁底
面、３……保管棚のアクリル表面、４，５，６，
７……弗素系樹脂製の球。
FIG. 1 is a perspective view of a conventional semiconductor wafer storage jig. FIG. 2 is a perspective view of an embodiment of the present invention, and FIG. 3 is a front view. In the figure, 1, 2...the bottom surface of the side wall of the storage jig, 3...the acrylic surface of the storage shelf, 4, 5, 6,
7... Ball made of fluorine resin.
Claims (1)
素系樹脂製の球を挿入した構造を有することを特
徴とする半導体ウエハ用収納治具。 A semiconductor wafer storage jig characterized by having a structure in which a fluorine-based resin ball is inserted into the bottom of the side wall of the metal semiconductor wafer storage jig.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2399885U JPS61140537U (en) | 1985-02-21 | 1985-02-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2399885U JPS61140537U (en) | 1985-02-21 | 1985-02-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61140537U true JPS61140537U (en) | 1986-08-30 |
Family
ID=30517744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2399885U Pending JPS61140537U (en) | 1985-02-21 | 1985-02-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61140537U (en) |
-
1985
- 1985-02-21 JP JP2399885U patent/JPS61140537U/ja active Pending
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