JPH0477255U - - Google Patents
Info
- Publication number
- JPH0477255U JPH0477255U JP12091590U JP12091590U JPH0477255U JP H0477255 U JPH0477255 U JP H0477255U JP 12091590 U JP12091590 U JP 12091590U JP 12091590 U JP12091590 U JP 12091590U JP H0477255 U JPH0477255 U JP H0477255U
- Authority
- JP
- Japan
- Prior art keywords
- box
- wafer storage
- storage box
- fluororesin
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000002184 metal Substances 0.000 claims 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Landscapes
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
- Packaging Frangible Articles (AREA)
Description
第１図は本考案の一実施例を示すウエーハ収納
箱の断面図、第２図は従来の一例を示すウエーハ
収納箱の断面図である。
１，１ａ……溝、２……箱本体、３……ウエー
ハ、４……フツ素樹脂層。
FIG. 1 is a sectional view of a wafer storage box showing an embodiment of the present invention, and FIG. 2 is a sectional view of a wafer storage box showing an example of the conventional art. 1, 1a... Groove, 2... Box body, 3... Wafer, 4... Fluorine resin layer.
Claims (1)
して形成されている箱形形状の金属性のウエーハ
収納箱において、前溝表面にフツ素樹脂が塗布さ
れていることを特徴とするウエーハ収納箱。 A box-shaped metal wafer storage box in which a plurality of grooves into which wafers are inserted are formed facing each other on both inner walls, and the wafer storage box is characterized in that a fluororesin is coated on the front groove surface. box.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12091590U JPH0477255U (en) | 1990-11-19 | 1990-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12091590U JPH0477255U (en) | 1990-11-19 | 1990-11-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0477255U true JPH0477255U (en) | 1992-07-06 |
Family
ID=31868796
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12091590U Pending JPH0477255U (en) | 1990-11-19 | 1990-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0477255U (en) |
-
1990
- 1990-11-19 JP JP12091590U patent/JPH0477255U/ja active Pending
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