JPH01130542U - - Google Patents
Info
- Publication number
- JPH01130542U JPH01130542U JP2779188U JP2779188U JPH01130542U JP H01130542 U JPH01130542 U JP H01130542U JP 2779188 U JP2779188 U JP 2779188U JP 2779188 U JP2779188 U JP 2779188U JP H01130542 U JPH01130542 U JP H01130542U
- Authority
- JP
- Japan
- Prior art keywords
- side walls
- wafers
- semiconductor wafer
- storage jig
- wafer storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000004140 cleaning Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 239000004615 ingredient Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Description
第１図は本考案の半導体ウエハー収納治具の一
実施例を示す斜視図、第２図は本考案の半導体ウ
エハー収納治具の他の実施例を示す斜視図、第３
図は従来の半導体ウエハー収納治具を示す斜視図
である。
１……ウエハー支持用溝、２ａ，２ｂ……半導
体収納治具側壁、３……開口部。
FIG. 1 is a perspective view showing one embodiment of the semiconductor wafer storage jig of the present invention, FIG. 2 is a perspective view showing another embodiment of the semiconductor wafer storage jig of the present invention, and FIG.
The figure is a perspective view showing a conventional semiconductor wafer storage jig. 1...Wafer support groove, 2a, 2b...Semiconductor storage jig side wall, 3...Opening.
Claims (1)
エツチング等を行う際、複数のウエハースを収納
する半導体ウエハース収納治具において、少なく
とも一対の対向する側壁の各々に該側壁と同じ幅
をもつ水平な開口部を有することを特徴とする半
導体ウエハー収納治具。 Cleaning of semiconductor substrates (hereinafter referred to as wafers),
A semiconductor wafer storage jig for storing a plurality of wafers during etching, etc., characterized in that each of at least a pair of opposing side walls has a horizontal opening having the same width as the side walls. Ingredients.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2779188U JPH01130542U (en) | 1988-03-01 | 1988-03-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2779188U JPH01130542U (en) | 1988-03-01 | 1988-03-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01130542U true JPH01130542U (en) | 1989-09-05 |
Family
ID=31250594
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2779188U Pending JPH01130542U (en) | 1988-03-01 | 1988-03-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01130542U (en) |
-
1988
- 1988-03-01 JP JP2779188U patent/JPH01130542U/ja active Pending