JPS6196535U - - Google Patents
Info
- Publication number
- JPS6196535U JPS6196535U JP18161184U JP18161184U JPS6196535U JP S6196535 U JPS6196535 U JP S6196535U JP 18161184 U JP18161184 U JP 18161184U JP 18161184 U JP18161184 U JP 18161184U JP S6196535 U JPS6196535 U JP S6196535U
- Authority
- JP
- Japan
- Prior art keywords
- quartz boat
- grooves
- positioning
- side plates
- round bar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図はこの考案の一実施例を示す側面図、第
２図は従来の石英ボートの斜視図、第３図はその
側面図である。
図において、１，２は側板、３はウエハ、４は
溝、７，８は端板、９は底板、１５，１６は基準
面である。尚、図中同一符号は同一又は相当部分
を示す。
FIG. 1 is a side view showing an embodiment of this invention, FIG. 2 is a perspective view of a conventional quartz boat, and FIG. 3 is a side view thereof. In the figure, 1 and 2 are side plates, 3 is a wafer, 4 is a groove, 7 and 8 are end plates, 9 is a bottom plate, and 15 and 16 are reference planes. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
相対向した側板または丸棒、この側板または丸棒
を両端面並びに底面で固定する端板及び底板を有
し、上記両端面の外側を加工し、上記溝の位置出
し及び石英ボートの位置決め用基準面を設けたこ
とを特徴とする石英ボート。 It has opposite side plates or a round bar with grooves for vertically arranging semiconductor wafers, an end plate and a bottom plate for fixing the side plates or the round bar at both end faces and a bottom face, and the outer sides of both end faces are machined to form the grooves. A quartz boat characterized by having a reference surface for positioning the quartz boat and positioning the quartz boat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18161184U JPS6196535U (en) | 1984-11-28 | 1984-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18161184U JPS6196535U (en) | 1984-11-28 | 1984-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6196535U true JPS6196535U (en) | 1986-06-21 |
Family
ID=30739155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18161184U Pending JPS6196535U (en) | 1984-11-28 | 1984-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6196535U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6398123A (en) * | 1986-10-15 | 1988-04-28 | Tokai Kounetsu Kogyo Kk | Manufacture of wafer boat for manufacturing semiconductor |
-
1984
- 1984-11-28 JP JP18161184U patent/JPS6196535U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6398123A (en) * | 1986-10-15 | 1988-04-28 | Tokai Kounetsu Kogyo Kk | Manufacture of wafer boat for manufacturing semiconductor |
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