JPS6276537U - - Google Patents
Info
- Publication number
- JPS6276537U JPS6276537U JP16878285U JP16878285U JPS6276537U JP S6276537 U JPS6276537 U JP S6276537U JP 16878285 U JP16878285 U JP 16878285U JP 16878285 U JP16878285 U JP 16878285U JP S6276537 U JPS6276537 U JP S6276537U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- grooves
- plates
- stopper
- flat plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 6
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図は本考案のウエハーカセツトの斜視図、
第２図は従来のウエハーカセツトの斜視図である
。
１…ウエハー、２…平板、３…縦溝、４…ウエ
ハーストツパ、４ａ…受溝、４ｂ…平坦部。
FIG. 1 is a perspective view of the wafer cassette of the present invention.
FIG. 2 is a perspective view of a conventional wafer cassette. DESCRIPTION OF SYMBOLS 1... Wafer, 2... Flat plate, 3... Vertical groove, 4... Wafer stopper, 4a... Receiving groove, 4b... Flat part.
Claims (1)
れ両板間にまたがつてウエハーを垂直姿勢に立て
掛けて収納する縦溝を備えたウエハーカセツトに
おいて、前記各平板の下部にウエハーストツパを
設け、該ウエハーストツパに前記平板の縦溝の各
々に対応させてウエハーの周縁一部を受け入れる
受溝を設けたことを特徴とするウエハーカセツト
。 A wafer cassette is provided with vertical grooves on the opposing surfaces of two parallel flat plates for storing wafers leaning vertically across the two plates, and a wafer stopper is provided at the bottom of each of the flat plates. A wafer cassette, characterized in that the wafer stopper is provided with receiving grooves for receiving part of the periphery of the wafer, corresponding to each of the longitudinal grooves of the flat plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16878285U JPS6276537U (en) | 1985-11-01 | 1985-11-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16878285U JPS6276537U (en) | 1985-11-01 | 1985-11-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6276537U true JPS6276537U (en) | 1987-05-16 |
Family
ID=31101975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16878285U Pending JPS6276537U (en) | 1985-11-01 | 1985-11-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6276537U (en) |
-
1985
- 1985-11-01 JP JP16878285U patent/JPS6276537U/ja active Pending