JPS6361145U - - Google Patents

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Publication number
JPS6361145U
JPS6361145U JP15646286U JP15646286U JPS6361145U JP S6361145 U JPS6361145 U JP S6361145U JP 15646286 U JP15646286 U JP 15646286U JP 15646286 U JP15646286 U JP 15646286U JP S6361145 U JPS6361145 U JP S6361145U
Authority
JP
Japan
Prior art keywords
storage box
semiconductor wafer
opposing
wafer storage
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15646286U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15646286U priority Critical patent/JPS6361145U/ja
Publication of JPS6361145U publication Critical patent/JPS6361145U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の半導体ウエハ収納ボツクスの
一実施例の斜視図、第２図は同じく他の実施例を
示す上面図、第３図は従来例を示す斜視図である
。 １：箱状容器、２，２′：溝、３：仕切板、４
：溝、５，５′：凹部、６：ネジ、８：ナツト。 FIG. 1 is a perspective view of one embodiment of the semiconductor wafer storage box of the present invention, FIG. 2 is a top view of another embodiment, and FIG. 3 is a perspective view of a conventional example. 1: Box-shaped container, 2, 2': Groove, 3: Partition plate, 4
: groove, 5, 5': recess, 6: screw, 8: nut.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 相対向する二辺に設けられたそれぞれ相対向す
る溝の間にその両端をそれぞれ保持した状態で収
納される半導体ウエハ収納ボツクスにおいて、前
記対向する溝の一方が前記収納ボツクス内を前記
他の対向する溝の設けられている辺と平行し移動
可能に設けられた可動仕切板に設けられているこ
とを特徴とする半導体ウエハ収納ボツクス。 In a semiconductor wafer storage box that is stored with its both ends held between opposing grooves provided on two opposing sides, one of the opposing grooves extends inside the storage box toward the other opposing groove. A semiconductor wafer storage box characterized in that the semiconductor wafer storage box is provided on a movable partition plate that is movably provided parallel to the side on which the groove is provided.
JP15646286U 1986-10-13 1986-10-13 Pending JPS6361145U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15646286U JPS6361145U (en) 1986-10-13 1986-10-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15646286U JPS6361145U (en) 1986-10-13 1986-10-13

Publications (1)

Publication Number Publication Date
JPS6361145U true JPS6361145U (en) 1988-04-22

Family

ID=31078101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15646286U Pending JPS6361145U (en) 1986-10-13 1986-10-13

Country Status (1)

Country Link
JP (1) JPS6361145U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07326657A (en) * 1994-05-31 1995-12-12 Korea Electron Telecommun Cassette of wafer installation of manufacturing equipment ofsemiconductor
JP2012109622A (en) * 2006-10-25 2012-06-07 Siltronic Ag Method for simultaneously slicing at least two cylindrical workpieces into many wafers

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07326657A (en) * 1994-05-31 1995-12-12 Korea Electron Telecommun Cassette of wafer installation of manufacturing equipment ofsemiconductor
JP2012109622A (en) * 2006-10-25 2012-06-07 Siltronic Ag Method for simultaneously slicing at least two cylindrical workpieces into many wafers

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