JPS6176959U - - Google Patents
Info
- Publication number
- JPS6176959U JPS6176959U JP16276384U JP16276384U JPS6176959U JP S6176959 U JPS6176959 U JP S6176959U JP 16276384 U JP16276384 U JP 16276384U JP 16276384 U JP16276384 U JP 16276384U JP S6176959 U JPS6176959 U JP S6176959U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cassette holder
- raise
- vertical plane
- base part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図は従来のウエハカセツトホルダーの斜視
図、第２図は第１図Ａ−Ａの断面図、第３図〜第
４図は本考案の実施例を示す断面図である。
１……ウエハカセツトホルダー、２……溝、３
……ウエハ、４……くさび形状の台、５……高さ
調整ネジ。
FIG. 1 is a perspective view of a conventional wafer cassette holder, FIG. 2 is a sectional view taken along line A-A in FIG. 1, and FIGS. 3 and 4 are sectional views showing an embodiment of the present invention. 1...Wafer cassette holder, 2...Groove, 3
...Wafer, 4...Wedge-shaped stand, 5...Height adjustment screw.
Claims (1)
高める基台部が形成され、内側の相対する両側面
に形成された複数個のウエハ固定用の溝が垂直面
に対して傾斜していることを特徴とするウエハカ
セツトホルダー。 A base part is formed at the bottom to raise one of the wafer storage arrangement directions, and a plurality of wafer fixing grooves formed on both opposing inner sides are inclined with respect to the vertical plane. Characteristic wafer cassette holder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16276384U JPS6176959U (en) | 1984-10-26 | 1984-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16276384U JPS6176959U (en) | 1984-10-26 | 1984-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6176959U true JPS6176959U (en) | 1986-05-23 |
Family
ID=30720635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16276384U Pending JPS6176959U (en) | 1984-10-26 | 1984-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6176959U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0650344U (en) * | 1991-02-07 | 1994-07-08 | コマツ電子金属株式会社 | Wafer container tilt table |
-
1984
- 1984-10-26 JP JP16276384U patent/JPS6176959U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0650344U (en) * | 1991-02-07 | 1994-07-08 | コマツ電子金属株式会社 | Wafer container tilt table |