JPS6258042U - - Google Patents
Info
- Publication number
- JPS6258042U JPS6258042U JP14932385U JP14932385U JPS6258042U JP S6258042 U JPS6258042 U JP S6258042U JP 14932385 U JP14932385 U JP 14932385U JP 14932385 U JP14932385 U JP 14932385U JP S6258042 U JPS6258042 U JP S6258042U
- Authority
- JP
- Japan
- Prior art keywords
- grooves
- carrier
- wafer
- accommodating
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図及び第２図は実施例の断面図、第３図は
従来例の平面図、第４図は第３図のＡ―Ａ′線断
面図である。
１１はウエハキヤリア、１２は底部、１３は斜
辺、１４は長辺、１５は半導体ウエハ、１６は溝
部、１７は短辺である。
1 and 2 are sectional views of the embodiment, FIG. 3 is a plan view of the conventional example, and FIG. 4 is a sectional view taken along the line AA' in FIG. 3. 11 is a wafer carrier, 12 is a bottom, 13 is an oblique side, 14 is a long side, 15 is a semiconductor wafer, 16 is a groove, and 17 is a short side.
Claims (1)
部が形成されて成るウエハキヤリアにおいて、 上記溝部が垂直方向に対して所定の角度を有し
て形成されて成るウエハキヤリア。[Claims for Utility Model Registration] A wafer carrier comprising a plurality of grooves for accommodating one semiconductor wafer, wherein the grooves are formed at a predetermined angle with respect to the vertical direction. Carrier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14932385U JPS6258042U (en) | 1985-09-30 | 1985-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14932385U JPS6258042U (en) | 1985-09-30 | 1985-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6258042U true JPS6258042U (en) | 1987-04-10 |
Family
ID=31064420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14932385U Pending JPS6258042U (en) | 1985-09-30 | 1985-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6258042U (en) |
-
1985
- 1985-09-30 JP JP14932385U patent/JPS6258042U/ja active Pending