JPS6171366U - - Google Patents
Info
- Publication number
- JPS6171366U JPS6171366U JP15668584U JP15668584U JPS6171366U JP S6171366 U JPS6171366 U JP S6171366U JP 15668584 U JP15668584 U JP 15668584U JP 15668584 U JP15668584 U JP 15668584U JP S6171366 U JPS6171366 U JP S6171366U
- Authority
- JP
- Japan
- Prior art keywords
- tweezers
- handling
- disc
- utility
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Description
第1図は本考案を実施した半導体ウエハース用
ピンセツトを示す図である。
1……ピンセツトの本体、2……ウエハースの
ささえ部。
FIG. 1 shows a tweezers for semiconductor wafers embodying the present invention. 1...The main body of the tweezers, 2...The supporting part for the wafer.
Claims (1)
トにおいて、該物体のささえを有することを特徴
とするピンセツト。 A tweezers used for handling a disc-shaped object, characterized in that the tweezers have a support for the object.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15668584U JPS6171366U (en) | 1984-10-17 | 1984-10-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15668584U JPS6171366U (en) | 1984-10-17 | 1984-10-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6171366U true JPS6171366U (en) | 1986-05-15 |
Family
ID=30714690
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15668584U Pending JPS6171366U (en) | 1984-10-17 | 1984-10-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6171366U (en) |
-
1984
- 1984-10-17 JP JP15668584U patent/JPS6171366U/ja active Pending