JPH01139433U - - Google Patents
Info
- Publication number
- JPH01139433U JPH01139433U JP3563088U JP3563088U JPH01139433U JP H01139433 U JPH01139433 U JP H01139433U JP 3563088 U JP3563088 U JP 3563088U JP 3563088 U JP3563088 U JP 3563088U JP H01139433 U JPH01139433 U JP H01139433U
- Authority
- JP
- Japan
- Prior art keywords
- stocker
- semiconductor wafers
- carriers
- protrusion
- tilting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000000969 carrier Substances 0.000 claims 2
Description
第１図は本考案の一実施例を示す要部正断面図
、第２図は第１図の要部拡大断面図、第３図及び
第４図はそれぞれ本考案の他の実施例を示す要部
正面図である。
１……半導体ウエハ、２……キヤリア、４……
ストツカ、４ａ……ストツカ底面、４ａ′，４ｂ
，４ｃ……突出部。
Fig. 1 is a front sectional view of the main part showing one embodiment of the present invention, Fig. 2 is an enlarged sectional view of the main part of Fig. 1, and Figs. 3 and 4 respectively show other embodiments of the invention. It is a main part front view. 1...Semiconductor wafer, 2...Carrier, 4...
Stocker, 4a... Bottom of stocker, 4a', 4b
, 4c... protrusion.
Claims (1)
ヤリアを収納するストツカ底面にキヤリア内の半
導体ウエハを配列方向に傾斜させる突出部を設け
たことを特徴とするウエハ収納ストツカ。 A wafer storage stocker for storing carriers in which semiconductor wafers are stored vertically at predetermined intervals, characterized in that a protrusion is provided on the bottom surface of the stocker for tilting the semiconductor wafers in the carriers in the arrangement direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3563088U JPH01139433U (en) | 1988-03-16 | 1988-03-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3563088U JPH01139433U (en) | 1988-03-16 | 1988-03-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01139433U true JPH01139433U (en) | 1989-09-22 |
Family
ID=31262273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3563088U Pending JPH01139433U (en) | 1988-03-16 | 1988-03-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01139433U (en) |
-
1988
- 1988-03-16 JP JP3563088U patent/JPH01139433U/ja active Pending