JPS6418742U - - Google Patents
Info
- Publication number
- JPS6418742U JPS6418742U JP11336987U JP11336987U JPS6418742U JP S6418742 U JPS6418742 U JP S6418742U JP 11336987 U JP11336987 U JP 11336987U JP 11336987 U JP11336987 U JP 11336987U JP S6418742 U JPS6418742 U JP S6418742U
- Authority
- JP
- Japan
- Prior art keywords
- stopper
- wafer
- box
- carrier
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 6
Description
第１図は本考案の一実施例の部分断面で示した
斜視図、第２図、第３図は第１図のストツパが出
ている時および収納時のストツパ部の拡大図、第
４図は本考案の第２の実施例の部分断面斜視図、
第５図は従来のウエハーキヤリアの一例の部分断
面斜視図である。
１……ウエハー、２……ストツパ、３……スト
ツパ止め、４……ストツパ収納止め、１０……ウ
エハーキヤリア。
Fig. 1 is a partially sectional perspective view of an embodiment of the present invention, Figs. 2 and 3 are enlarged views of the stopper shown in Fig. 1 when it is exposed and when it is retracted, and Fig. 4. is a partially sectional perspective view of a second embodiment of the present invention;
FIG. 5 is a partially sectional perspective view of an example of a conventional wafer carrier. 1... Wafer, 2... Stopper, 3... Stopper stop, 4... Stopper storage stop, 10... Wafer carrier.
Claims (1)
と側面部とを有する箱状のウエハーキヤリアにお
いて、前記箱状の側面部のウエハー入口部に可撓
性部材で設けられその入口部から箱状部内側に突
出して前記ウエハーの落下を抑えるストツパと、
このストツパを突出状態にするように前記側面部
に設けられたストツパ止めと、前記ストツパを突
出させない状態に保持するよう前記側面部に設け
られたストツパ収納止めとを備えたことを特徴と
するウエハーキヤリア。 In a box-shaped wafer carrier having a bottom part and side parts for storing wafers during wafer transportation, a flexible member is provided at the wafer entrance part of the box-shaped side part and projects from the entrance part to the inside of the box part. a stopper for preventing the wafer from falling;
A wafer comprising: a stopper stop provided on the side surface so as to cause the stopper to protrude; and a stopper storage stop provided on the side surface so as to hold the stopper in a non-protruding state. Carrier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11336987U JPS6418742U (en) | 1987-07-23 | 1987-07-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11336987U JPS6418742U (en) | 1987-07-23 | 1987-07-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6418742U true JPS6418742U (en) | 1989-01-30 |
Family
ID=31353143
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11336987U Pending JPS6418742U (en) | 1987-07-23 | 1987-07-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6418742U (en) |
-
1987
- 1987-07-23 JP JP11336987U patent/JPS6418742U/ja active Pending