JPS63187338U - - Google Patents
Info
- Publication number
- JPS63187338U JPS63187338U JP7908187U JP7908187U JPS63187338U JP S63187338 U JPS63187338 U JP S63187338U JP 7908187 U JP7908187 U JP 7908187U JP 7908187 U JP7908187 U JP 7908187U JP S63187338 U JPS63187338 U JP S63187338U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- attached
- stopper
- semiconductor wafers
- detached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 3
- 235000012431 wafers Nutrition 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
Landscapes
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Packaging Frangible Articles (AREA)
Description
第１図は本考案の一実施例を示す斜視図、第２
図は同実施例における搬送具の斜視図、第３図は
本考案の他の実施例を示す斜視図、第４図は同実
施例における搬送具の斜視図、第５図は本考案の
さらに他の実施例を示す斜視図、第６図乃至第９
図はそれぞれ異なる従来例を示す斜視図である。
１…キヤリア、２…搬送具、３，４…ストツパ
ー。
Fig. 1 is a perspective view showing one embodiment of the present invention;
3 is a perspective view showing another embodiment of the present invention, FIG. 4 is a perspective view of the carrier according to the same embodiment, and FIG. 5 is a perspective view of another embodiment of the present invention. Perspective views showing other embodiments, FIGS. 6 to 9
The figures are perspective views showing different conventional examples. 1...Carrier, 2...Transportation tool, 3, 4...Stopper.
Claims (1)
リアと、該キヤリアに着脱自在に取付けられたキ
ヤリアを運搬するための搬送具と、上記キヤリア
内に収納された上記半導体ウエハの浮きを防止す
るためのストツパーを備え、該ストツパーは上記
搬送具に設けられ、上記搬送具の上記キヤリアへ
の着脱に伴なつて上記キヤリアの上面開口に取付
け或いは取外しされるよう構成したことを特徴と
する半導体製造治工具。 A carrier for arranging and storing a plurality of semiconductor wafers, a conveyance tool detachably attached to the carrier for transporting the carrier, and a carrier for preventing the semiconductor wafers stored in the carrier from floating. A semiconductor manufacturing jig comprising a stopper, the stopper being provided on the carrier and configured to be attached to or removed from the upper opening of the carrier as the carrier is attached to or detached from the carrier. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7908187U JPS63187338U (en) | 1987-05-25 | 1987-05-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7908187U JPS63187338U (en) | 1987-05-25 | 1987-05-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63187338U true JPS63187338U (en) | 1988-11-30 |
Family
ID=30928615
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7908187U Pending JPS63187338U (en) | 1987-05-25 | 1987-05-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63187338U (en) |
-
1987
- 1987-05-25 JP JP7908187U patent/JPS63187338U/ja active Pending
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