JPS62114444U - - Google Patents
Info
- Publication number
- JPS62114444U JPS62114444U JP203986U JP203986U JPS62114444U JP S62114444 U JPS62114444 U JP S62114444U JP 203986 U JP203986 U JP 203986U JP 203986 U JP203986 U JP 203986U JP S62114444 U JPS62114444 U JP S62114444U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- grooves
- hold
- workbench
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 2
Landscapes
- Packaging Frangible Articles (AREA)
- Warehouses Or Storage Devices (AREA)
Description
図面は本考案の一実施例を示し、第１図は平面
図、第２図は第１図のＡ―Ａ線断面図、第３図は
側面図、第４図はウエハの水平出入状態を示す概
略立面図、第５図はウエハの上方取出し状態を示
す概略縦断面図である。
１……キヤリヤ、５……溝、７……取手、８…
…作業台、１０……開口部。
The drawings show one embodiment of the present invention, and FIG. 1 is a plan view, FIG. 2 is a sectional view taken along the line A--A in FIG. 1, FIG. 3 is a side view, and FIG. FIG. 5 is a schematic vertical sectional view showing a state in which the wafer is taken out from above. 1...Carrier, 5...Groove, 7...Handle, 8...
...Workbench, 10...Opening.
Claims (1)
にウエハの両側部を垂直に対し傾斜して保持する
多数の溝を並設し、キヤリヤ外側に溝が水平とな
るようキヤリヤを作業台上に傾斜保持する取手を
取付けたウエハ搬送用キヤリヤ。 A number of grooves that hold both sides of the wafer at an angle to the vertical are installed in a carrier that is open at the top and has an opening at the bottom, and the carrier is tilted onto the workbench so that the grooves are horizontal on the outside of the carrier. A carrier for transporting wafers with a handle to hold them.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP203986U JPS62114444U (en) | 1986-01-13 | 1986-01-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP203986U JPS62114444U (en) | 1986-01-13 | 1986-01-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62114444U true JPS62114444U (en) | 1987-07-21 |
Family
ID=30780505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP203986U Pending JPS62114444U (en) | 1986-01-13 | 1986-01-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62114444U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0650344U (en) * | 1991-02-07 | 1994-07-08 | コマツ電子金属株式会社 | Wafer container tilt table |
| JP2013008920A (en) * | 2011-06-27 | 2013-01-10 | Mitsubishi Electric Corp | Wafer cassette |
-
1986
- 1986-01-13 JP JP203986U patent/JPS62114444U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0650344U (en) * | 1991-02-07 | 1994-07-08 | コマツ電子金属株式会社 | Wafer container tilt table |
| JP2013008920A (en) * | 2011-06-27 | 2013-01-10 | Mitsubishi Electric Corp | Wafer cassette |