JPH0260248U

JPH0260248U -

Info

Publication number: JPH0260248U
Application number: JP13926888U
Authority: JP
Priority date: 1988-10-27
Filing date: 1988-10-27
Publication date: 1990-05-02

Description

[Brief explanation of drawings]

第１図は本考案の一実施例に係るウエハキヤリ
ヤ収納ボツクスの全体構成を示す斜視図、第２図
は第１図のものの要部をロボツトハンドとの関係
で示す拡大側面図、第３図は第１図のものの上蓋
の縦置状態を示す側面図、第４図は従来のウエハ
キヤリヤ収納ボツクスの一例を示す分解図、第５
図は従来のウエハキヤリヤ収納ボツクスの他の例
を示す側面図、第６図乃至第９図はいずれも従来
のウエハキヤリヤ収納ボツクスの更に他の例を示
すもので、第６図は上蓋が閉じている状態を示す
側面図、第７図は上蓋が下部収納部から分離され
ている状態を示す分解図、第８図は第７図とは異
なる作動状態を示す側面図、第９図は第６図のも
のの要部を拡大して示す斜視図である。図において、１は下部収納部、２は上蓋、２ａ
は上蓋の周側面、４は把手である。 FIG. 1 is a perspective view showing the overall structure of a wafer carrier storage box according to an embodiment of the present invention, FIG. 2 is an enlarged side view showing the main parts of the box shown in FIG. 1 in relation to a robot hand, and FIG. Fig. 1 is a side view showing the top lid placed vertically, Fig. 4 is an exploded view showing an example of a conventional wafer carrier storage box, and Fig. 5 is an exploded view showing an example of a conventional wafer carrier storage box.
The figure is a side view showing another example of a conventional wafer carrier storage box, and Figures 6 to 9 all show still other examples of the conventional wafer carrier storage box, and Figure 6 shows the top lid closed. 7 is an exploded view showing a state in which the upper lid is separated from the lower storage portion, FIG. 8 is a side view showing a different operating state from FIG. 7, and FIG. FIG. In the figure, 1 is the lower storage part, 2 is the upper lid, 2a
is the circumferential side of the upper lid, and 4 is a handle.

Claims

[Scope of utility model registration request]

A wafer carrier comprising a lower storage part consisting of a bottomed frame body capable of accommodating a plurality of wafer carriers containing semiconductor wafers, and an upper lid in the form of a bottomed frame that is joined to the opening of the lower storage part so as to be able to come into contact with and separate from the lower part of the storage part to seal it. A wafer carrier storage box characterized in that handles are provided at a plurality of locations on the circumferential side of the upper lid, and each of these handles is configured to serve as a support leg when the upper lid is placed vertically.