JPS6359332U - - Google Patents
Info
- Publication number
- JPS6359332U JPS6359332U JP15307486U JP15307486U JPS6359332U JP S6359332 U JPS6359332 U JP S6359332U JP 15307486 U JP15307486 U JP 15307486U JP 15307486 U JP15307486 U JP 15307486U JP S6359332 U JPS6359332 U JP S6359332U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- carrier
- support stand
- semiconductor wafers
- pushing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 10
Description
図はこの考案の一実施例を示し、第１図Ａはウ
エハキヤリアの外観斜視図、第１図Ｂはピツクア
ツプ用補助治具の外観斜視図、第２図はウエハキ
ヤリアをピツクアツプ用補助治具に載置した状態
の断面図である。
１……ウエハキヤリア、１ａ……保持溝、１ｄ
……開口、２……半導体ウエハ、３……ピツクア
ツプ用補助治具、４……キヤリア支持台、４ａ…
…開口、５……ウエハ押上げ部材、６……操作部
材。
The figures show one embodiment of this invention, in which Fig. 1A is an external perspective view of a wafer carrier, Fig. 1B is an external perspective view of an auxiliary jig for picking up the wafer carrier, and Fig. 2 is an auxiliary jig for picking up the wafer carrier. FIG. 1... Wafer carrier, 1a... Holding groove, 1d
...Opening, 2...Semiconductor wafer, 3...Auxiliary jig for pick-up, 4...Carrier support stand, 4a...
...Opening, 5...Wafer pushing member, 6...Operation member.
Claims (1)
部を有するウエハキヤリアを載置し、かつウエハ
キヤリアの下部開口と対応する開口を有するキヤ
リア支持台と、 前記ウエハキヤリア内のウエハ収納部に対向し
て前記キヤリア支持台内に設けられ、かつ前記ウ
エハキヤリア内の半導体ウエハを押し上げる複数
のウエハ押上げ部材と、 前記複数のウエハ押上げ部材にそれぞれ対応し
て設けられ、所定の操作で前記ウエハ押上げ部材
を上昇させる複数の操作部材と、 を具備してなる半導体ウエハのピツクアツプ用補
助治具。[Scope of Claim for Utility Model Registration] A carrier support stand on which a wafer carrier having a wafer storage part for arranging and storing semiconductor wafers is placed therein, and having an opening corresponding to a lower opening of the wafer carrier; a plurality of wafer push-up members provided in the carrier support stand facing the wafer storage section and for pushing up semiconductor wafers in the wafer carrier; An auxiliary jig for picking up a semiconductor wafer, comprising: a plurality of operating members for lifting the wafer pushing member by the following operations.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15307486U JPS6359332U (en) | 1986-10-07 | 1986-10-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15307486U JPS6359332U (en) | 1986-10-07 | 1986-10-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6359332U true JPS6359332U (en) | 1988-04-20 |
Family
ID=31071632
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15307486U Pending JPS6359332U (en) | 1986-10-07 | 1986-10-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6359332U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11793393B2 (en) | 2013-03-28 | 2023-10-24 | Endochoice, Inc. | Manifold for a multiple viewing elements endoscope |
-
1986
- 1986-10-07 JP JP15307486U patent/JPS6359332U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11793393B2 (en) | 2013-03-28 | 2023-10-24 | Endochoice, Inc. | Manifold for a multiple viewing elements endoscope |
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