JPS63195734U - - Google Patents
Info
- Publication number
- JPS63195734U JPS63195734U JP8737187U JP8737187U JPS63195734U JP S63195734 U JPS63195734 U JP S63195734U JP 8737187 U JP8737187 U JP 8737187U JP 8737187 U JP8737187 U JP 8737187U JP S63195734 U JPS63195734 U JP S63195734U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transfer jig
- wafer transfer
- cassette
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 11
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
Description
第１図は、本考案による一実施例の斜視図であ
る。第２図ａ〜ｄは、従来方法によるウエハ移載
作業の説明図、第３図は、本考案による一実施例
の側面図、第４図ａ〜ｃは、本考案の治具による
ウエハ移載作業の説明図である。
１，２，１０，２０……ウエハカセツト、３，
３０……ウエハ、８０……カセツト位置決め板、
９０……カセツト転倒防止板。
FIG. 1 is a perspective view of an embodiment of the present invention. Figures 2a to d are explanatory diagrams of wafer transfer work by the conventional method, Figure 3 is a side view of an embodiment of the present invention, and Figures 4a to c are wafer transfer operations using the jig of the present invention. It is an explanatory diagram of the loading work. 1, 2, 10, 20...wafer cassette, 3,
30...Wafer, 80...Cassette positioning plate,
90...Cassette fall prevention plate.
Claims (1)
ら、他方のウエハカセツトに移し替える為の治具
において、ウエハを水平方向に保持する方向で、
２つのウエハカセツトを対向して固定させたこと
を特徴とするウエハ移載治具。 (2) 前記ウエハ移載治具において、上部にウエ
ハカセツト転倒防止用板を設けたことを特徴とす
る実用新案登録請求の範囲第１項記載のウエハ移
載治具。 (3) 前記ウエハ移載治具において、底部が水平
部及びテーパー部から成つていることを特徴とす
る実用新案登録請求の範囲第１項記載のウエハ移
載治具。[Scope of Claim for Utility Model Registration] (1) In a jig for transferring semiconductor wafers from one wafer cassette to another wafer cassette, in a direction in which the wafers are held horizontally,
A wafer transfer jig characterized by fixing two wafer cassettes facing each other. (2) The wafer transfer jig according to claim 1, which is a utility model, and is characterized in that the wafer transfer jig is provided with a plate for preventing the wafer cassette from falling over at the top thereof. (3) The wafer transfer jig according to claim 1, wherein the bottom portion of the wafer transfer jig includes a horizontal portion and a tapered portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8737187U JPS63195734U (en) | 1987-06-05 | 1987-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8737187U JPS63195734U (en) | 1987-06-05 | 1987-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63195734U true JPS63195734U (en) | 1988-12-16 |
Family
ID=30944517
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8737187U Pending JPS63195734U (en) | 1987-06-05 | 1987-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63195734U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014222700A (en) * | 2013-05-13 | 2014-11-27 | 三菱電機株式会社 | Wafer replacement jig and wafer replacement method |
-
1987
- 1987-06-05 JP JP8737187U patent/JPS63195734U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014222700A (en) * | 2013-05-13 | 2014-11-27 | 三菱電機株式会社 | Wafer replacement jig and wafer replacement method |
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