JPS5823809U - Semiconductor wafer transport chute - Google Patents

Semiconductor wafer transport chute

Info

Publication number
JPS5823809U
JPS5823809U JP11692881U JP11692881U JPS5823809U JP S5823809 U JPS5823809 U JP S5823809U JP 11692881 U JP11692881 U JP 11692881U JP 11692881 U JP11692881 U JP 11692881U JP S5823809 U JPS5823809 U JP S5823809U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafer transport
transport chute
chute
abstract
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11692881U
Other languages
Japanese (ja)
Inventor
三谷　幸一
Original Assignee
山形日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 山形日本電気株式会社 filed Critical 山形日本電気株式会社
Priority to JP11692881U priority Critical patent/JPS5823809U/en
Publication of JPS5823809U publication Critical patent/JPS5823809U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図ａ、　　ｂは従来の半導体ウェーハ搬送用シュー
トの一例の斜視図および断面図、第２図ａ。 ｂは本考案の一実施例の斜視図および断面図である。 １・・・・・・シュート、２・・・・・・半導体ウェー
ハ、１１・・・・・・シュート、１２・・・・・・レー
ル。FIGS. 1a and 1b are a perspective view and a cross-sectional view of an example of a conventional semiconductor wafer transfer chute, and FIG. b is a perspective view and a sectional view of an embodiment of the present invention. 1...Chute, 2...Semiconductor wafer, 11...Chute, 12...Rail.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 断面が凹字形で長い機影の半導体ウェーハ搬送用シュー
トにおいて、前記シュートの底面に、かつ長手方向に少
（とも２本のレールを設けたことを特徴とする半導体ウ
ェーハ搬送用シュート。A chute for transporting semiconductor wafers having a concave shape in cross section and a long shadow, characterized in that a number of (at least two) rails are provided on the bottom surface of the chute in the longitudinal direction.
JP11692881U 1981-08-05 1981-08-05 Semiconductor wafer transport chute Pending JPS5823809U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11692881U JPS5823809U (en) 1981-08-05 1981-08-05 Semiconductor wafer transport chute

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11692881U JPS5823809U (en) 1981-08-05 1981-08-05 Semiconductor wafer transport chute

Publications (1)

Publication Number Publication Date
JPS5823809U true JPS5823809U (en) 1983-02-15

Family

ID=29911136

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11692881U Pending JPS5823809U (en) 1981-08-05 1981-08-05 Semiconductor wafer transport chute

Country Status (1)

Country Link
JP (1) JPS5823809U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010001155A (en) * 2008-06-19 2010-01-07 Yoshitaka Aoyama Curved passage member for transporting component

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010001155A (en) * 2008-06-19 2010-01-07 Yoshitaka Aoyama Curved passage member for transporting component

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