JPS5998646U - Instruction management table storage case used in the semiconductor wafer manufacturing process - Google Patents
Instruction management table storage case used in the semiconductor wafer manufacturing processInfo
- Publication number
- JPS5998646U JPS5998646U JP19760782U JP19760782U JPS5998646U JP S5998646 U JPS5998646 U JP S5998646U JP 19760782 U JP19760782 U JP 19760782U JP 19760782 U JP19760782 U JP 19760782U JP S5998646 U JPS5998646 U JP S5998646U
- Authority
- JP
- Japan
- Prior art keywords
- storage case
- manufacturing process
- management table
- semiconductor wafer
- instruction management
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図はこの考案による検移票収納ケースの斜視図、第
２図はウェハ収納ケースの斜視図、第３図は検移票収納
ケースとウェハ収納ケースとのハンドリングを説明する
ための舶親図である。
図中、１は検移票収納ケース、ｌａ、ｌｂは切欠溝、２
はウェハ収納ケース、２ａ、 ２ｂは切欠溝、３ａ、
３ｂはチャックである。なお、図中の同一符号は同一ま
たは相当部分を示す。Fig. 1 is a perspective view of a transfer slip storage case according to this invention, Fig. 2 is a perspective view of a wafer storage case, and Fig. 3 is a shipyard diagram for explaining the handling of the transfer slip storage case and wafer storage case. It is a diagram. In the figure, 1 is a transfer slip storage case, la and lb are notched grooves, 2
is a wafer storage case, 2a, 2b are notched grooves, 3a,
3b is a chuck. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
有するウェハ収納ケースを用い左右から開閉するチャッ
クにより前記切欠溝を保持し、移送を行う半導体ウェハ
の製造工程において、前記ウェハ収納ケースに設けられ
た切欠溝と同じ高さで、かつ同じ対向距離を有する切欠
溝を設けるとともに、内部の指示管理表を容易に外部か
ら確認できるように形成したことを特徴とする半導体ウ
ェハの製造工程に用いる指示管理表収納ケース。In a semiconductor wafer manufacturing process in which a wafer storage case is used in which a semiconductor wafer is housed and has a notched groove on a predetermined opposing surface, the notched groove is held and transferred by a chuck that opens and closes from the left and right sides. Used in the manufacturing process of semiconductor wafers, characterized in that a notch groove is provided at the same height and with the same facing distance as the notched groove, and an internal instruction management table is formed so that it can be easily checked from the outside. Instruction management table storage case.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19760782U JPS5998646U (en) | 1982-12-23 | 1982-12-23 | Instruction management table storage case used in the semiconductor wafer manufacturing process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19760782U JPS5998646U (en) | 1982-12-23 | 1982-12-23 | Instruction management table storage case used in the semiconductor wafer manufacturing process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5998646U true JPS5998646U (en) | 1984-07-04 |
Family
ID=30423043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19760782U Pending JPS5998646U (en) | 1982-12-23 | 1982-12-23 | Instruction management table storage case used in the semiconductor wafer manufacturing process |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5998646U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62240226A (en) * | 1986-04-08 | 1987-10-21 | Mitsubishi Electric Corp | Cassette transfer device |
-
1982
- 1982-12-23 JP JP19760782U patent/JPS5998646U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62240226A (en) * | 1986-04-08 | 1987-10-21 | Mitsubishi Electric Corp | Cassette transfer device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS58138340U (en) | Carrier for cleaning and etching wafers | |
| JPS5998646U (en) | Instruction management table storage case used in the semiconductor wafer manufacturing process | |
| JPS5839039U (en) | Vapor deposition jig for semiconductor devices | |
| JPS5888239U (en) | Mask for semiconductor equipment | |
| JPS60119742U (en) | Storage jig for semiconductor wafers | |
| JPS6146730U (en) | Wafer mounting cassette | |
| JPS59180424U (en) | Jig for semiconductor substrate | |
| JPS6132077U (en) | Tray for transporting semiconductor wafers | |
| JPS5933250U (en) | Storage tray for semiconductor devices | |
| JPS58180643U (en) | Semiconductor device package | |
| JPS6068648U (en) | Carrier for semiconductor wafer | |
| JPS5983029U (en) | semiconductor substrate | |
| JPS58118692U (en) | socket | |
| JPS5974727U (en) | Semiconductor device tray | |
| JPS58124952U (en) | Storage jig for semiconductor wafers | |
| JPS5881935U (en) | Annealing container | |
| JPS5825039U (en) | semiconductor substrate | |
| JPS6112298U (en) | Tray for semiconductor devices | |
| JPS602834U (en) | positioning mechanism | |
| JPS5995628U (en) | Photomask equipment | |
| JPS59166446U (en) | Semiconductor wafer holding container | |
| JPS5823809U (en) | Semiconductor wafer transport chute | |
| JPS58120661U (en) | semiconductor equipment | |
| JPS6063939U (en) | Cassette for semiconductor wafers | |
| JPS60169900U (en) | Tray for transporting semiconductor equipment |