JPS59173333U - wafer carrier - Google Patents
wafer carrierInfo
- Publication number
- JPS59173333U JPS59173333U JP6755083U JP6755083U JPS59173333U JP S59173333 U JPS59173333 U JP S59173333U JP 6755083 U JP6755083 U JP 6755083U JP 6755083 U JP6755083 U JP 6755083U JP S59173333 U JPS59173333 U JP S59173333U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- wafer
- holding
- parts
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のウェハキャリアの構成を示す斜視図、第
２図は第１図の部分的平面図、第３図Ａ乃至Ｅは従来の
ウェハ処理工程の一例を説明するための図、第４図Ａ、
Ｂは本考案の一実施例に係るウェハキャリアの構成を
示すもので、同図Ａは側面断面図、同図Ｂは斜視図、第
５図Ａ、 Ｂおよび第６図Ａ、 Ｂはそれぞれ第４図Ａ
、 Ｂのウェハキャリアの動作を説明するための図で、
第５図Ａおよび第６図Ａは側面断面図、第５図Ｂおよび
第６図Ｂは平面図である。
１１・・・ウェハ、２０・・・キャリア本体、２１・・
・収納部、２２・・・保持部、２３・・・ストッパ。FIG. 1 is a perspective view showing the configuration of a conventional wafer carrier, FIG. 2 is a partial plan view of FIG. 4 Figure A,
B shows the structure of a wafer carrier according to an embodiment of the present invention; FIG. A is a side sectional view, FIG. B is a perspective view, and FIGS. Figure 4 A
, B is a diagram for explaining the operation of the wafer carrier,
5A and 6A are side sectional views, and FIGS. 5B and 6B are plan views. 11... Wafer, 20... Carrier body, 21...
- Storage section, 22... Holding section, 23... Stopper.
Claims (1)
の収納部と、この各収納部に設けられてウェハーをその
一方の表面周辺部で保持する溝状、 の保持部と
、この各保持部においてウエノ１をその他方の表面周辺
部で保持する側に設けられて各ウェハが上記収納部から
抜は出ることを停止させるストッパとを具備したことを
特徴とするウェハキャリア。a plurality of storage parts that store a plurality of wafers at regular intervals; a groove-like holding part provided in each of the storage parts to hold the wafers around one surface thereof; and each of the holding parts. A wafer carrier comprising: a stopper provided on the side holding the wafer 1 at the periphery of the other surface to stop each wafer from being removed from the storage section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6755083U JPS59173333U (en) | 1983-05-06 | 1983-05-06 | wafer carrier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6755083U JPS59173333U (en) | 1983-05-06 | 1983-05-06 | wafer carrier |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59173333U true JPS59173333U (en) | 1984-11-19 |
Family
ID=30197739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6755083U Pending JPS59173333U (en) | 1983-05-06 | 1983-05-06 | wafer carrier |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59173333U (en) |
-
1983
- 1983-05-06 JP JP6755083U patent/JPS59173333U/en active Pending
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