JPS5996836U - semiconductor wafer cassette - Google Patents

semiconductor wafer cassette

Info

Publication number
JPS5996836U
JPS5996836U JP19477282U JP19477282U JPS5996836U JP S5996836 U JPS5996836 U JP S5996836U JP 19477282 U JP19477282 U JP 19477282U JP 19477282 U JP19477282 U JP 19477282U JP S5996836 U JPS5996836 U JP S5996836U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafer cassette
cassette
pockets
subjected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19477282U
Other languages
Japanese (ja)
Inventor
正人 藤沢
Original Assignee
三菱電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to JP19477282U priority Critical patent/JPS5996836U/en
Publication of JPS5996836U publication Critical patent/JPS5996836U/en
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図はこの考案の一実施例を示すカセットの斜視図、
第２図はポケットにタグ票を入れた状態の側面図である
。 図中、１はカセット、２は受は板、３はポケット、４は
浮し板、５はタグ票である。なお、図中の同一符号は同
一または相当部分を示す。FIG. 1 is a perspective view of a cassette showing an embodiment of this invention;
FIG. 2 is a side view of the tag slip placed in the pocket. In the figure, 1 is a cassette, 2 is a receiving plate, 3 is a pocket, 4 is a floating plate, and 5 is a tag slip. Note that the same reference numerals in the figures indicate the same or corresponding parts.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 多数の半導体ウェハをカセットに収納し、所要の工程を
施す半導体ウェハのカセットにおいて、前記カセットに
各工程を表示するカートを収納するためのポケツｌ〜を
設けたことを特徴とする半導体ウェハカセット。A semiconductor wafer cassette in which a large number of semiconductor wafers are stored in the cassette and subjected to required processes, characterized in that the cassette is provided with pockets l for storing a cart displaying each process.
JP19477282U 1982-12-20 1982-12-20 semiconductor wafer cassette Pending JPS5996836U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19477282U JPS5996836U (en) 1982-12-20 1982-12-20 semiconductor wafer cassette

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19477282U JPS5996836U (en) 1982-12-20 1982-12-20 semiconductor wafer cassette

Publications (1)

Publication Number Publication Date
JPS5996836U true JPS5996836U (en) 1984-06-30

Family

ID=30418543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19477282U Pending JPS5996836U (en) 1982-12-20 1982-12-20 semiconductor wafer cassette

Country Status (1)

Country Link
JP (1) JPS5996836U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5671949A (en) * 1979-11-15 1981-06-15 Nissin Electric Co Ltd Specimen carrier for charge particle injector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5671949A (en) * 1979-11-15 1981-06-15 Nissin Electric Co Ltd Specimen carrier for charge particle injector

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