JPS5895636U - Loading/unloading device for wafers, etc. - Google Patents

Loading/unloading device for wafers, etc.

Info

Publication number
JPS5895636U
JPS5895636U JP19227281U JP19227281U JPS5895636U JP S5895636 U JPS5895636 U JP S5895636U JP 19227281 U JP19227281 U JP 19227281U JP 19227281 U JP19227281 U JP 19227281U JP S5895636 U JPS5895636 U JP S5895636U
Authority
JP
Japan
Prior art keywords
wafers
loading
unloading device
unloading
recorded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19227281U
Other languages
Japanese (ja)
Inventor
和夫 飯塚
Original Assignee
キヤノン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by キヤノン株式会社 filed Critical キヤノン株式会社
Priority to JP19227281U priority Critical patent/JPS5895636U/en
Publication of JPS5895636U publication Critical patent/JPS5895636U/en
Pending legal-status Critical Current

Links

Landscapes

  • Delivering By Means Of Belts And Rollers (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図乃至第４図は従来例の説明図、第５図乃至第７図
は本考案の実施例の図。 図中１．２はキャリア、３はウニ六、４．４’。 ５はベルト、６，７はキャリア設置台、８はキャリア結
合棒である。FIGS. 1 to 4 are explanatory diagrams of a conventional example, and FIGS. 5 to 7 are diagrams of an embodiment of the present invention. In the figure, 1.2 is a carrier, 3 is a sea urchin, and 4.4'. 5 is a belt, 6 and 7 are carrier installation stands, and 8 is a carrier coupling rod.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 複数枚のウェハ等を収納するキャリアを搬出若しくは搬
入の方向に沿って覆複数個配設したことを特徴とするウ
ェハ等の搬出入装置。A loading/unloading device for wafers, etc., characterized in that a plurality of carriers for storing a plurality of wafers, etc. are arranged in a covered manner along the loading/unloading direction.
JP19227281U 1981-12-22 1981-12-22 Loading/unloading device for wafers, etc. Pending JPS5895636U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19227281U JPS5895636U (en) 1981-12-22 1981-12-22 Loading/unloading device for wafers, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19227281U JPS5895636U (en) 1981-12-22 1981-12-22 Loading/unloading device for wafers, etc.

Publications (1)

Publication Number Publication Date
JPS5895636U true JPS5895636U (en) 1983-06-29

Family

ID=30105692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19227281U Pending JPS5895636U (en) 1981-12-22 1981-12-22 Loading/unloading device for wafers, etc.

Country Status (1)

Country Link
JP (1) JPS5895636U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60169841U (en) * 1984-04-18 1985-11-11 株式会社プラズマシステム Automatic supply and storage device for semiconductor wafers
JPS62195143A (en) * 1986-02-21 1987-08-27 Nippon Kogaku Kk <Nikon> High-speed exchange device for substrate
JPS6431431A (en) * 1987-07-28 1989-02-01 Tokyo Electron Ltd Conveying method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5893340A (en) * 1981-11-30 1983-06-03 Kokusai Electric Co Ltd Conveyor for wafer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5893340A (en) * 1981-11-30 1983-06-03 Kokusai Electric Co Ltd Conveyor for wafer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60169841U (en) * 1984-04-18 1985-11-11 株式会社プラズマシステム Automatic supply and storage device for semiconductor wafers
JPS62195143A (en) * 1986-02-21 1987-08-27 Nippon Kogaku Kk <Nikon> High-speed exchange device for substrate
JPS6431431A (en) * 1987-07-28 1989-02-01 Tokyo Electron Ltd Conveying method

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