JPS58133935U - Magazine for semiconductor wafer storage - Google Patents
Magazine for semiconductor wafer storageInfo
- Publication number
- JPS58133935U JPS58133935U JP2990482U JP2990482U JPS58133935U JP S58133935 U JPS58133935 U JP S58133935U JP 2990482 U JP2990482 U JP 2990482U JP 2990482 U JP2990482 U JP 2990482U JP S58133935 U JPS58133935 U JP S58133935U
- Authority
- JP
- Japan
- Prior art keywords
- magazine
- semiconductor wafer
- wafer storage
- magnetic material
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Recording Or Reproducing By Magnetic Means (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図面はこの考案に係わる半導体ウエノ１収納用マガジン
の一実施例を示す斜視図である。
１・・・・・・与ガジン、２・・・・・・側板、３・・
・・・・支杆、４・・・・・・収納碑、５・・・・・・
半導体ウェハ、６・・・・・・磁性体。
【The drawing is a perspective view showing an embodiment of a magazine for storing semiconductor wafer 1 according to this invention. 1...Gazine, 2...Side plate, 3...
...branch, 4...storage monument, 5...
Semiconductor wafer, 6...magnetic material. [
Claims (2)
枚数の半導体ウェハを所定間隔で収納するマガジンにお
いて、製造、処理に必要な情報を記憶させ得る磁性体を
付加させたこぶを特徴とする半導体ウェハ収納用マガジ
ン。(1) A magazine that is used in the manufacturing process of semiconductor integrated circuit devices and stores a predetermined number of semiconductor wafers at a predetermined interval, and is characterized by a nub to which a magnetic material is added that can store information necessary for manufacturing and processing. Magazine for storing semiconductor wafers.
に消去が可能であることを特徴とする実用新案登録請求
の範囲第１項記載の半導体ウニ／’％収納用マガジン。 ゛(2) The magazine for storing semiconductor sea urchins according to claim 1, wherein information can be written, read, and erased in the magnetic material.゛
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2990482U JPS58133935U (en) | 1982-03-02 | 1982-03-02 | Magazine for semiconductor wafer storage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2990482U JPS58133935U (en) | 1982-03-02 | 1982-03-02 | Magazine for semiconductor wafer storage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58133935U true JPS58133935U (en) | 1983-09-09 |
Family
ID=30041666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2990482U Pending JPS58133935U (en) | 1982-03-02 | 1982-03-02 | Magazine for semiconductor wafer storage |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58133935U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01170013A (en) * | 1987-12-25 | 1989-07-05 | Teru Kyushu Kk | Wafer transfer method |
-
1982
- 1982-03-02 JP JP2990482U patent/JPS58133935U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01170013A (en) * | 1987-12-25 | 1989-07-05 | Teru Kyushu Kk | Wafer transfer method |
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