JPS605129U - Carrier for semiconductor wafer - Google Patents
Carrier for semiconductor waferInfo
- Publication number
- JPS605129U JPS605129U JP9686983U JP9686983U JPS605129U JP S605129 U JPS605129 U JP S605129U JP 9686983 U JP9686983 U JP 9686983U JP 9686983 U JP9686983 U JP 9686983U JP S605129 U JPS605129 U JP S605129U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- carrier
- groove
- opposite direction
- semiconductors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来使用されているキャリヤの外観図、第２図
は第１図のキャリヤの溝部断面図、第３図は本考案の実
施例によるキャリヤの溝部断面図、第４図は従来使用さ
れているキャリヤを用いた場合のうつし替え作業説明図
、第５図は本考案の実施例によるキャリヤを用いた場合
のうつし替え作業説明図。
図中、１はキャリヤ本体、２はウェハ、３ハＶ字型溝、
４はキャリヤ本体、５はＶ字型溝、６は丸棒、７は貫通
穴、８′はウェハ収納キャリヤ、９は空キャリヤ、１０
はウェハ収納キャリヤ、１１は空キャリヤである。Fig. 1 is an external view of a conventionally used carrier, Fig. 2 is a sectional view of the groove of the carrier of Fig. 1, Fig. 3 is a sectional view of the groove of the carrier according to the embodiment of the present invention, and Fig. 4 is a conventionally used carrier. FIG. 5 is a diagram illustrating a reloading operation using a carrier according to an embodiment of the present invention; FIG. In the figure, 1 is the carrier body, 2 is the wafer, 3 is the V-shaped groove,
4 is a carrier body, 5 is a V-shaped groove, 6 is a round bar, 7 is a through hole, 8' is a wafer storage carrier, 9 is an empty carrier, 10
1 is a wafer storage carrier, and 11 is an empty carrier.
Claims (1)
に、互に対向して形成された複数の貫通せるＶ字型断面
を有する溝の一端に、該溝にそった一方向にのみ半導体
ウェハが通り抜は可能となり、逆方向に対しては通り抜
けを阻止するストップ機構をもつ事を特徴とする半導体
ウェハ用キャリヤ。In order to store a plurality of semiconductors in parallel and at equal distances, one end of a groove having a plurality of penetrating V-shaped cross sections formed facing each other, and extending in one direction along the groove. A semiconductor wafer carrier characterized in that it has a stop mechanism that allows the semiconductor wafer to pass through only in the opposite direction, and prevents the semiconductor wafer from passing through in the opposite direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9686983U JPS605129U (en) | 1983-06-23 | 1983-06-23 | Carrier for semiconductor wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9686983U JPS605129U (en) | 1983-06-23 | 1983-06-23 | Carrier for semiconductor wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS605129U true JPS605129U (en) | 1985-01-14 |
Family
ID=30230668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9686983U Pending JPS605129U (en) | 1983-06-23 | 1983-06-23 | Carrier for semiconductor wafer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS605129U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04354351A (en) * | 1991-05-31 | 1992-12-08 | Shin Etsu Handotai Co Ltd | Wafer transfer method and device |
-
1983
- 1983-06-23 JP JP9686983U patent/JPS605129U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04354351A (en) * | 1991-05-31 | 1992-12-08 | Shin Etsu Handotai Co Ltd | Wafer transfer method and device |
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