JPS63170464U - - Google Patents
Info
- Publication number
- JPS63170464U JPS63170464U JP6168887U JP6168887U JPS63170464U JP S63170464 U JPS63170464 U JP S63170464U JP 6168887 U JP6168887 U JP 6168887U JP 6168887 U JP6168887 U JP 6168887U JP S63170464 U JPS63170464 U JP S63170464U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holder
- grooves
- supported
- boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 14
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図ａ，ｂはそれぞれ本考案におけるウエー
ハホルダを構成する本体ウエーハホルダ部とウエ
ーハ搬送用ウエーハホルダ部の一例を示す正面図
及び平面図、第２図は本考案におけるボートの一
例を示す正面図、第３図ａ〜ｄは本考案装置の一
実施例の動作説明図、第４図ａ，ｂはそれぞれ従
来におけるウエーハホルダにウエーハを載置した
状態を示した正面図及び平面図、第５図は従来に
おけるボートの一例を示す正面図である。
１……ボート、２……ホルダ用溝、３……ウエ
ーハホルダ、３ａ……本体ウエーハホルダ部、３
ｂ……ウエーハ搬送用ウエーハホルダ部、４……
ウエーハ、５……載置部、６……（Ｕ字状）切欠
部、６ａ……周縁部、７……ロボツト。
Figures 1a and b are a front view and a plan view respectively showing an example of the main body wafer holder part and the wafer transporting wafer holder part constituting the wafer holder in the present invention, and Figure 2 is a front view showing an example of the boat in the present invention. Figures 3a to 3d are explanatory diagrams of the operation of an embodiment of the device of the present invention. FIG. 5 is a front view showing an example of a conventional boat. 1... Boat, 2... Holder groove, 3... Wafer holder, 3a... Main body wafer holder part, 3
b...Wafer holder section for wafer transport, 4...
Wafer, 5... Placement part, 6... (U-shaped) notch, 6a... Peripheral part, 7... Robot.
Claims (1)
長さ方向に等間隔に設け、この各ホルダ用溝内に
ウエーハホルダを支持させ、各ウエーハホルダ上
にウエーハを載置し、これらのウエーハの表面に
ＣＶＤ膜を生成する縦型ＣＶＤ装置において、前
記各ホルダ用溝間に一時、ウエーハを載せる載置
部を設け、前記各ウエーハホルダは各ホルダ用溝
に支持された切欠部を有する本体ウエーハホルダ
部と、切欠部の周縁部に嵌合して支持されるウエ
ーハ搬送用ウエーハホルダ部とよりなり、ウエー
ハ及びウエーハ搬送用ウエーハホルダ部を水平移
動させる動作、上下動させる動作及び回転させる
動作を行うロボツトを設置してなる縦型ＣＶＤ用
ウエーハ着脱装置。 A large number of holder grooves are provided inside the boat at equal intervals in the length direction of the boat, wafer holders are supported in each of the holder grooves, wafers are placed on each wafer holder, and these wafer grooves are placed on each wafer holder. In a vertical CVD apparatus that generates a CVD film on a surface, a mounting part for temporarily placing a wafer is provided between each of the holder grooves, and each of the wafer holders has a main body wafer having a notch supported by each holder groove. It consists of a holder part and a wafer holder part for wafer transport which is fitted and supported by the peripheral edge of the notch part, and can perform horizontal movement, vertical movement and rotation of the wafer and the wafer holder part for wafer transport. A vertical CVD wafer attachment/detachment device equipped with a robot.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6168887U JPH0441173Y2 (en) | 1987-04-22 | 1987-04-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6168887U JPH0441173Y2 (en) | 1987-04-22 | 1987-04-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63170464U true JPS63170464U (en) | 1988-11-07 |
| JPH0441173Y2 JPH0441173Y2 (en) | 1992-09-28 |
Family
ID=30895261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6168887U Expired JPH0441173Y2 (en) | 1987-04-22 | 1987-04-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0441173Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02114938U (en) * | 1989-03-03 | 1990-09-14 | ||
| JP2002060947A (en) * | 2000-07-07 | 2002-02-28 | Asm Internatl Nv | Cvd of atomic layer |
-
1987
- 1987-04-22 JP JP6168887U patent/JPH0441173Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02114938U (en) * | 1989-03-03 | 1990-09-14 | ||
| JP2002060947A (en) * | 2000-07-07 | 2002-02-28 | Asm Internatl Nv | Cvd of atomic layer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0441173Y2 (en) | 1992-09-28 |
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