JPS61129341U - - Google Patents
Info
- Publication number
- JPS61129341U JPS61129341U JP1352085U JP1352085U JPS61129341U JP S61129341 U JPS61129341 U JP S61129341U JP 1352085 U JP1352085 U JP 1352085U JP 1352085 U JP1352085 U JP 1352085U JP S61129341 U JPS61129341 U JP S61129341U
- Authority
- JP
- Japan
- Prior art keywords
- processing
- processing device
- equal intervals
- registration request
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は、本考案の実施例を示す斜視図、第２
図は、搬送装置が位置決めしながら進行する状態
を示す図で各処理装置と搬送装置との対応関係を
示す図である。
１，２，３，４…カセツト、１３…搬送装置、
Ａ１〜Ａ３…処理装置、Ｂ１〜Ｂ３…処理装置、
Ｓ…位置決め装置。
Fig. 1 is a perspective view showing an embodiment of the present invention;
The figure shows a state in which the transport device advances while positioning, and is a diagram showing the correspondence between each processing device and the transport device. 1, 2, 3, 4...cassette, 13...conveying device,
A1 to A3 ...processing device, B1 to B3 ...processing device,
S...Positioning device.
Claims (1)
、前記方向に位置決め装置付の搬送装置を設け、
該搬送装置に、前記処理装置と対向する複数の収
容部を設けたことを特徴とするウエハ選択処理装
置。 A plurality of processing devices are arranged at equal intervals in the same direction, and a conveying device with a positioning device is provided in the direction,
A wafer selection and processing device, characterized in that the transfer device is provided with a plurality of accommodating portions facing the processing device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1352085U JPS61129341U (en) | 1985-02-01 | 1985-02-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1352085U JPS61129341U (en) | 1985-02-01 | 1985-02-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61129341U true JPS61129341U (en) | 1986-08-13 |
Family
ID=30497605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1352085U Pending JPS61129341U (en) | 1985-02-01 | 1985-02-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61129341U (en) |
-
1985
- 1985-02-01 JP JP1352085U patent/JPS61129341U/ja active Pending
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