JPS6078137U - Wafer transfer device - Google Patents
Wafer transfer deviceInfo
- Publication number
- JPS6078137U JPS6078137U JP17080883U JP17080883U JPS6078137U JP S6078137 U JPS6078137 U JP S6078137U JP 17080883 U JP17080883 U JP 17080883U JP 17080883 U JP17080883 U JP 17080883U JP S6078137 U JPS6078137 U JP S6078137U
- Authority
- JP
- Japan
- Prior art keywords
- holding jig
- transfer device
- wafer transfer
- arm
- transfer arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来例を示す全体の側面図、第２図は第１図に
示される保持用治具と搬送アームとの係合状態を示す横
断面図、第３図〜第８図は本考案の実施例を示すもので
、第３図は全体の側面図、第４図は要部の斜視図、第５
図、第９図および第１０図は保持用治具と搬送アームと
の係合状態を示す横断面図、第６図〜第８図は搬送アー
ムの他の実施例を示す斜視図である。
図面中、１１・・・保持用治具、１３・・・被係合部、
１４．２１，２３，２５・・・搬送アーム、１５・・・
切欠、１６．２２． ２４．２６・・・係合部、１７・
・・熱処理室、１８・・・アーム駆動部。Fig. 1 is an overall side view showing the conventional example, Fig. 2 is a cross-sectional view showing the engagement state of the holding jig and the transfer arm shown in Fig. 1, and Figs. 3 to 8 are the main parts. Fig. 3 shows an overall side view, Fig. 4 is a perspective view of the main parts, and Fig. 5 shows an embodiment of the invention.
9 and 10 are cross-sectional views showing the engaged state of the holding jig and the transfer arm, and FIGS. 6 to 8 are perspective views showing other embodiments of the transfer arm. In the drawings, 11... Holding jig, 13... Engaged portion,
14.21, 23, 25...transport arm, 15...
Notch, 16.22. 24.26...Engagement part, 17.
...Heat treatment chamber, 18...Arm drive section.
Claims (1)
具を支持する搬送アームと、この搬送アームを適宜駆動
することにより前記保持用治具を熱処理室に搬入し、か
つ搬出するアーム駆動部とを備えたウェーハ搬送装置に
おいて、前記保持用治具の両側には被係合部がそれぞれ
外方に向って形成され、かつ前記搬送アームは下部に長
手方向の切欠が設けられていると共に両側内方に前記保
持用治具の被係合部に係合可能な構成としたことを特徴
とするウェーハ搬送装置。A holding jig that holds a plurality of wafers, a transfer arm that supports the holding jig, and an arm drive that carries the holding jig into and out of the heat treatment chamber by appropriately driving the transfer arm. In the wafer transfer device, engaged portions are formed on both sides of the holding jig, each facing outward, and the transfer arm is provided with a longitudinal notch at the bottom thereof, and A wafer transfer device characterized in that the wafer transfer device is configured to be capable of engaging with the engaged portions of the holding jig inwardly on both sides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17080883U JPS6078137U (en) | 1983-11-02 | 1983-11-02 | Wafer transfer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17080883U JPS6078137U (en) | 1983-11-02 | 1983-11-02 | Wafer transfer device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6078137U true JPS6078137U (en) | 1985-05-31 |
| JPH0142340Y2 JPH0142340Y2 (en) | 1989-12-12 |
Family
ID=30372780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17080883U Granted JPS6078137U (en) | 1983-11-02 | 1983-11-02 | Wafer transfer device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6078137U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH024236U (en) * | 1989-06-12 | 1990-01-11 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53129964A (en) * | 1977-04-20 | 1978-11-13 | Hitachi Ltd | Method and device for inserting and taking out of heat treatment jig |
| JPS54159170A (en) * | 1978-06-07 | 1979-12-15 | Hitachi Ltd | Tool for wafer processing |
-
1983
- 1983-11-02 JP JP17080883U patent/JPS6078137U/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53129964A (en) * | 1977-04-20 | 1978-11-13 | Hitachi Ltd | Method and device for inserting and taking out of heat treatment jig |
| JPS54159170A (en) * | 1978-06-07 | 1979-12-15 | Hitachi Ltd | Tool for wafer processing |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH024236U (en) * | 1989-06-12 | 1990-01-11 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0142340Y2 (en) | 1989-12-12 |
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