JPS6031964U - Weight structure for wafer polishing equipment - Google Patents

Weight structure for wafer polishing equipment

Info

Publication number
JPS6031964U
JPS6031964U JP1983124712U JP12471283U JPS6031964U JP S6031964 U JPS6031964 U JP S6031964U JP 1983124712 U JP1983124712 U JP 1983124712U JP 12471283 U JP12471283 U JP 12471283U JP S6031964 U JPS6031964 U JP S6031964U
Authority
JP
Japan
Prior art keywords
wafer polishing
weight structure
polishing equipment
divided
parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1983124712U
Other languages
Japanese (ja)
Inventor
浩一郎 市川
Original Assignee
不二越機械工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 不二越機械工業株式会社 filed Critical 不二越機械工業株式会社
Priority to JP1983124712U priority Critical patent/JPS6031964U/en
Publication of JPS6031964U publication Critical patent/JPS6031964U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はポリッシング装置斜視図、第２図および第３図
は本考案によるポリッシング第１図装置重り構造の実施
例を示す斜視図である。FIG. 1 is a perspective view of a polishing device, and FIGS. 2 and 3 are perspective views showing an embodiment of the weight structure of the polishing device shown in FIG. 1 according to the present invention.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）中央に取付孔が形成されていると共に、この取付
孔を通って二分割され、かつ二分割された各部分が互い
に係脱し得る如く、一方の分割部分には係合部が形成さ
れ、他方の分割部分には前記係合部と係脱可能な被係合
部が形成されていることを特徴とするウェハーポリッシ
ング装置重り構造。 、（２）前記保合部は蟻状に形成され、かつ前記被係合
部は蟻溝状に形成されてなる実用新案登録請求の範囲第
（１）項に記載のウェハーポリッシング装置用重り構造
。(1) A mounting hole is formed in the center, and an engaging part is formed in one of the divided parts so that it is divided into two parts through this mounting hole, and the two parts can be engaged and disengaged from each other. . A weight structure for a wafer polishing apparatus, wherein the other divided portion is formed with an engaged portion that is removable from the engaging portion. (2) The weight structure for a wafer polishing apparatus according to claim (1), wherein the retaining portion is formed in a dovetail shape, and the engaged portion is formed in a dovetail groove shape. .
JP1983124712U 1983-08-11 1983-08-11 Weight structure for wafer polishing equipment Pending JPS6031964U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983124712U JPS6031964U (en) 1983-08-11 1983-08-11 Weight structure for wafer polishing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983124712U JPS6031964U (en) 1983-08-11 1983-08-11 Weight structure for wafer polishing equipment

Publications (1)

Publication Number Publication Date
JPS6031964U true JPS6031964U (en) 1985-03-04

Family

ID=30284189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983124712U Pending JPS6031964U (en) 1983-08-11 1983-08-11 Weight structure for wafer polishing equipment

Country Status (1)

Country Link
JP (1) JPS6031964U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006055921A (en) * 2004-08-18 2006-03-02 Koushin Special Glass Co Ltd Polishing tool

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5553324U (en) * 1978-10-06 1980-04-10
JPH031426U (en) * 1989-05-23 1991-01-09

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5553324U (en) * 1978-10-06 1980-04-10
JPH031426U (en) * 1989-05-23 1991-01-09

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006055921A (en) * 2004-08-18 2006-03-02 Koushin Special Glass Co Ltd Polishing tool

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