JPS6413131U - - Google Patents
Info
- Publication number
- JPS6413131U JPS6413131U JP10722287U JP10722287U JPS6413131U JP S6413131 U JPS6413131 U JP S6413131U JP 10722287 U JP10722287 U JP 10722287U JP 10722287 U JP10722287 U JP 10722287U JP S6413131 U JPS6413131 U JP S6413131U
- Authority
- JP
- Japan
- Prior art keywords
- concave portion
- semiconductor device
- suction jig
- semiconductor devices
- chamfered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 4
- 239000008188 pellet Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Description
第１図ａは本考案の一実施例を示す正面図、第
１図ｂは同側面図、第２図ａは従来例を示す正面
図、第２図ｂは同側面図、第３図はペレツトのハ
ンドリング機構の一例を示す構成図である。
１……凹陥部、３……ペレツト、８……コレツ
ト、９〜１２……面取り。
Fig. 1a is a front view showing one embodiment of the present invention, Fig. 1b is a side view of the same, Fig. 2a is a front view of a conventional example, Fig. 2b is a side view of the same, Fig. 3 is a side view of the same. FIG. 3 is a configuration diagram showing an example of a pellet handling mechanism. 1...Concave portion, 3...Pellet, 8...Collection, 9-12...Chamfer.
Claims (1)
置を受け入れて吸着保持する凹陥部を端面に形成
してなる半導体装置の吸着治具において、半導体
装置と接触する前記凹陥部の角部に面取りを付し
たことを特徴とする半導体装置の吸着治具。 In a semiconductor device suction jig having a concave portion formed on an end face for receiving and adsorbing and holding semiconductor devices that are individually divided according to the state of a wafer, the corners of the concave portion that come into contact with the semiconductor device are chamfered. A suction jig for semiconductor devices characterized by the following.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10722287U JPS6413131U (en) | 1987-07-13 | 1987-07-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10722287U JPS6413131U (en) | 1987-07-13 | 1987-07-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6413131U true JPS6413131U (en) | 1989-01-24 |
Family
ID=31341440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10722287U Pending JPS6413131U (en) | 1987-07-13 | 1987-07-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6413131U (en) |
-
1987
- 1987-07-13 JP JP10722287U patent/JPS6413131U/ja active Pending
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