JPS63172200U - - Google Patents
Info
- Publication number
- JPS63172200U JPS63172200U JP6563987U JP6563987U JPS63172200U JP S63172200 U JPS63172200 U JP S63172200U JP 6563987 U JP6563987 U JP 6563987U JP 6563987 U JP6563987 U JP 6563987U JP S63172200 U JPS63172200 U JP S63172200U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor element
- suction nozzle
- positioning
- handling
- guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Description
第１図は本考案の一実施例に係る吸着ノズルの
斜視図、第２図は第１図のノズルにより３端子フ
ラツトパツク型半導体素子を吸着した状態を示す
斜視図、第３図は従来のノズルにより半導体素子
を吸着した状態を示す斜視図である。
１……ノズル本体、２……位置決め用ガイド、
３……被吸着の半導体素子。
FIG. 1 is a perspective view of a suction nozzle according to an embodiment of the present invention, FIG. 2 is a perspective view showing a three-terminal flat pack type semiconductor device being suctioned by the nozzle of FIG. 1, and FIG. 3 is a perspective view of a conventional nozzle. FIG. 3 is a perspective view showing a state in which a semiconductor element is attracted by the holder. 1... Nozzle body, 2... Positioning guide,
3...Semiconductor element to be attracted.
Claims (1)
着ノズルを備えた半導体装置の製造装置において
、前記吸着ノズルは前記半導体素子を位置決めす
るガイドを有していることを特徴とする半導体装
置の製造装置。 What is claimed is: 1. A semiconductor device manufacturing apparatus comprising a suction nozzle used when handling a semiconductor element, wherein the suction nozzle has a guide for positioning the semiconductor element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6563987U JPS63172200U (en) | 1987-04-28 | 1987-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6563987U JPS63172200U (en) | 1987-04-28 | 1987-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63172200U true JPS63172200U (en) | 1988-11-09 |
Family
ID=30902900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6563987U Pending JPS63172200U (en) | 1987-04-28 | 1987-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63172200U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03273204A (en) * | 1990-03-23 | 1991-12-04 | Nec Corp | Optical semiconductor element module |
-
1987
- 1987-04-28 JP JP6563987U patent/JPS63172200U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03273204A (en) * | 1990-03-23 | 1991-12-04 | Nec Corp | Optical semiconductor element module |
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