JPS63110041U - - Google Patents
Info
- Publication number
- JPS63110041U JPS63110041U JP157787U JP157787U JPS63110041U JP S63110041 U JPS63110041 U JP S63110041U JP 157787 U JP157787 U JP 157787U JP 157787 U JP157787 U JP 157787U JP S63110041 U JPS63110041 U JP S63110041U
- Authority
- JP
- Japan
- Prior art keywords
- parts
- tweezers
- semiconductor wafer
- holding
- scissor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
Description
第１図ａは本考案の一実施例のピンセツトに半
導体ウエーハを保持させた状態を示す斜視図、同
図ｂは同図ａのピンセツトの平面図、同図ｃは側
面図である。第２図は従来のピンセツトに半導体
ウエーハを保持させた状態を示す斜視図である。
１，１１……ピンセツト本体、１ａ……上条片
、１ｂ……下条片、２，４……はさみ保持部、３
……止めがね、５……半導体ウエーハ。
FIG. 1a is a perspective view showing a semiconductor wafer held in a tweezers according to an embodiment of the present invention, FIG. 1b is a plan view of the tweezers shown in FIG. 1a, and FIG. 1c is a side view. FIG. 2 is a perspective view showing a conventional tweezers holding a semiconductor wafer. 1, 11... Tweezers body, 1a... Upper strip, 1b... Lower strip, 2, 4... Scissors holding part, 3
...Stopper, 5...Semiconductor wafer.
Claims (1)
はさみ保持部を有するピンセツトにおいて、前記
はさみ保持部は、前記半導体ウエーハを二箇所の
部分ではさみ保持するように、それぞれ両側に二
つに分けられていることを特徴とするピンセツト
。 In the tweezers having upper and lower scissor holding parts for holding the semiconductor wafer between the two parts, the scissor holding part is divided into two parts on both sides so as to hold the semiconductor wafer in two parts. Tweezers featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP157787U JPS63110041U (en) | 1987-01-08 | 1987-01-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP157787U JPS63110041U (en) | 1987-01-08 | 1987-01-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63110041U true JPS63110041U (en) | 1988-07-15 |
Family
ID=30779617
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP157787U Pending JPS63110041U (en) | 1987-01-08 | 1987-01-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63110041U (en) |
-
1987
- 1987-01-08 JP JP157787U patent/JPS63110041U/ja active Pending