JPH0180934U - - Google Patents
Info
- Publication number
- JPH0180934U JPH0180934U JP1987176809U JP17680987U JPH0180934U JP H0180934 U JPH0180934 U JP H0180934U JP 1987176809 U JP1987176809 U JP 1987176809U JP 17680987 U JP17680987 U JP 17680987U JP H0180934 U JPH0180934 U JP H0180934U
- Authority
- JP
- Japan
- Prior art keywords
- section
- cassette
- processing
- surface treatment
- wafer transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004381 surface treatment Methods 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims 9
- 230000032258 transport Effects 0.000 claims 6
Description
第１図はこの考案の１実施例を示し、ウエハの
表面処理装置の全体を表した斜視図である。第２
図〜第４図はそれぞれこの考案の別の実施例を示
す、第１図と同様の斜視図である。
１……ウエハ移し替え部、２……カセツト収納
棚、３……表面処理部、４……カセツト搬送部、
５……カセツト移送装置、Ｃ１……搬送専用カセ
ツト、Ｃ２……処理専用カセツト、Ｗ……ウエハ
。
FIG. 1 shows one embodiment of this invention, and is a perspective view showing the entire wafer surface treatment apparatus. Second
4 to 4 are perspective views similar to FIG. 1, each showing another embodiment of this invention. 1... Wafer transfer section, 2... Cassette storage shelf, 3... Surface treatment section, 4... Cassette transport section,
5...Cassette transfer device, C1 ...Cassette exclusively for transport, C2 ...Cassette exclusively for processing, W...Wafer.
Claims (1)
複数枚のウエハの移し替えを行なう少なくとも１
つのウエハ移し替え部と、このウエハ移し替え部
の上方もしくは側方に配設され、前記カセツトの
少なくとも一方を収納することができるカセツト
収納棚と、一端部において前記ウエハ移し替え部
に連接し、処理専用カセツトに収容された複数枚
のウエハに対して所要の表面処理を施す表面処理
部と、この表面処理部に沿つて配設され、表面処
理部の処理開始位置近傍もしくは処理終了位置近
傍と前記ウエハ移し替え部との間で処理専用カセ
ツトの搬送を行なうカセツト搬送部と、前記ウエ
ハ移し替え部と前記カセツト収納棚との間で前記
カセツトの少なくとも一方の移送を行ない、前記
ウエハ移し替え部と前記カセツト搬送部との間、
前記カセツト搬送部と前記表面処理部との間、並
びに前記表面処理部と前記ウエハ移し替え部との
間でそれぞれ処理専用カセツトの移送を行なう共
通の、もしくは各別のカセツト移送手段とを備え
てなるウエハの表面処理装置。 At least one wafer is transferred between a cassette exclusively for transport and a cassette exclusively for processing.
a wafer transfer section, a cassette storage shelf disposed above or to the side of the wafer transfer section and capable of storing at least one of the cassettes, and connected to the wafer transfer section at one end; There is a surface treatment section that performs the required surface treatment on a plurality of wafers housed in a processing-dedicated cassette, and a surface treatment section that is arranged along the surface treatment section and located near the processing start position or near the processing end position of the surface treatment section. a cassette transport section that transports processing-dedicated cassettes to and from the wafer transfer section; a cassette transport section that transports at least one of the cassettes between the wafer transfer section and the cassette storage shelf; and the cassette transport section,
Common or separate cassette transfer means for transferring processing-dedicated cassettes between the cassette transfer section and the surface processing section, and between the surface processing section and the wafer transfer section, respectively. Wafer surface treatment equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17680987U JP2544056Y2 (en) | 1987-11-19 | 1987-11-19 | Wafer surface treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17680987U JP2544056Y2 (en) | 1987-11-19 | 1987-11-19 | Wafer surface treatment equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0180934U true JPH0180934U (en) | 1989-05-30 |
| JP2544056Y2 JP2544056Y2 (en) | 1997-08-13 |
Family
ID=31468512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17680987U Expired - Lifetime JP2544056Y2 (en) | 1987-11-19 | 1987-11-19 | Wafer surface treatment equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2544056Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000003894A (en) * | 1999-05-10 | 2000-01-07 | Tokyo Electron Ltd | Cleaner and its method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110299313B (en) * | 2019-07-04 | 2022-09-16 | 北京北方华创微电子装备有限公司 | Cleaning device and cleaning method |
-
1987
- 1987-11-19 JP JP17680987U patent/JP2544056Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000003894A (en) * | 1999-05-10 | 2000-01-07 | Tokyo Electron Ltd | Cleaner and its method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2544056Y2 (en) | 1997-08-13 |
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