JPH0184436U - - Google Patents
Info
- Publication number
- JPH0184436U JPH0184436U JP1987180479U JP18047987U JPH0184436U JP H0184436 U JPH0184436 U JP H0184436U JP 1987180479 U JP1987180479 U JP 1987180479U JP 18047987 U JP18047987 U JP 18047987U JP H0184436 U JPH0184436 U JP H0184436U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- tray
- storage plate
- frame body
- transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 1
Description
第１図乃至第７図は、本考案に係る半導体ウエ
ーハの移替装置の一実施例を示すもので、第１図
は側面図、第２図は平面図、第３図は搬送用トレ
ーの全体斜視図、第４図は第３図の縦断側面図、
第５図乃至第７図は上記装置の移替動作を説明す
るための縦断側面図である。第８図及び第９図は
夫々従来から利用されている搬送用トレー及び処
理キヤリアの全体斜視図である。
Ａ……移替装置、Ｂ……処理キヤリア、Ｗ……
半導体ウエーハ、２……収容部、３……保持溝、
１０……搬送用トレー、１２……枠体、１３……
収容板、１５……収容凹部、２１……押圧部材。
1 to 7 show an embodiment of a semiconductor wafer transfer device according to the present invention, in which FIG. 1 is a side view, FIG. 2 is a plan view, and FIG. 3 is a diagram of a transfer tray. Overall perspective view, Figure 4 is a vertical side view of Figure 3,
5 to 7 are longitudinal sectional side views for explaining the transfer operation of the above device. FIGS. 8 and 9 are overall perspective views of a conventionally used transport tray and processing carrier, respectively. A...transfer device, B...processing carrier, W...
Semiconductor wafer, 2...accommodating section, 3...holding groove,
10... Conveyance tray, 12... Frame, 13...
Accommodating plate, 15...accommodating recess, 21...pressing member.
Claims (1)
ウエーハを、上記搬送用トレーの下方に配置され
、上記半導体ウエーハの隣接辺を保持する保持溝
を備えた処理キヤリアに移替える装置であつて、 上記搬送用トレーを、 枠体と、 枠体内に長手方向に沿う軸線を中心に回転可能
に配設され、上面に上記半導体ウエーハを水平に
載置し得る寸法で、かつ、上記軸線に対して一方
側の端面側に開口させた幅方向の収容凹部を有す
る収容板とで構成し、 上記収容板の裏面側を押圧して上記収容凹部の
開口が下方に向くように上記収容板を回転させる
押圧部材を配設したことを特徴とする半導体ウエ
ーハの移替装置。[Claims for Utility Model Registration] A processing carrier that holds a rectangular semiconductor wafer placed and accommodated on a transport tray, and is provided with a holding groove that is disposed below the transport tray and holds adjacent sides of the semiconductor wafer. A device for transferring the transfer tray to a frame body, the transfer tray being rotatably arranged around an axis along the longitudinal direction within the frame body, and having dimensions that allow the semiconductor wafer to be placed horizontally on the upper surface thereof. and a storage plate having a widthwise storage recess opened on one end surface side with respect to the axis, and the opening of the storage recess is directed downward by pressing the back side of the storage plate. A semiconductor wafer transfer device characterized in that a pressing member for rotating the storage plate is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987180479U JPH0184436U (en) | 1987-11-26 | 1987-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987180479U JPH0184436U (en) | 1987-11-26 | 1987-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0184436U true JPH0184436U (en) | 1989-06-05 |
Family
ID=31471997
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987180479U Pending JPH0184436U (en) | 1987-11-26 | 1987-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0184436U (en) |
-
1987
- 1987-11-26 JP JP1987180479U patent/JPH0184436U/ja active Pending
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